1998
DOI: 10.1088/0957-0233/9/7/017
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Interferometer with a wavelength-tuned diode laser for surface profilometry

Abstract: An interference profilometer has been developed which uses a diode laser as a non-expensive, compact and wavelength tunable light source. The profilometer works like an optical stylus and can be realized at relatively low expense. Two different methods of interference signal processing have been worked out. Both methods take advantage of the wavelength tunability of the diode laser. In connection with the development of the profilometer the spectral properties of different types of diode laser in the wavelengt… Show more

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Cited by 9 publications
(8 citation statements)
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“…42 The obvious advantage of this is that the entire unit would not possess any moving parts with no additional optical components thereby resulting in a unit with very high degree of mechanical stability. Interferometry utilizing tunable lasers has been employed for surface profilometry 43 and length metrology. 44 It is interesting to note that Ishii et al 45 suggested that interferometers using phase shifters such as a PZT could be replaced with tunable laser sources.…”
Section: Resultsmentioning
confidence: 99%
“…42 The obvious advantage of this is that the entire unit would not possess any moving parts with no additional optical components thereby resulting in a unit with very high degree of mechanical stability. Interferometry utilizing tunable lasers has been employed for surface profilometry 43 and length metrology. 44 It is interesting to note that Ishii et al 45 suggested that interferometers using phase shifters such as a PZT could be replaced with tunable laser sources.…”
Section: Resultsmentioning
confidence: 99%
“…Comprehensive treatments of the theory of the PTI technique are presented in a number of studies (e.g., [ 138 , 139 , 141 , 142 ]), while the technique also finds common application in metrology [ 150 153 ]. Moosmüller et al [ 144 ] provided a review of PTI for particle absorption measurements following the critical advance of the folded Jamin interferometer by Moosmüller and Arnott [ 146 ].…”
Section: Measurement Techniquesmentioning
confidence: 99%
“…If the optical pathlength in one arm of the interferometer changes, a commensurate shift in the interference pattern will take place. So sensitive are these interferometric techniques to pathlength changes they are routinely used in the field of metrology where sub-nanometer scales can be realized (Ishii et al 1987;Downs 1990;Stone et al 1999;Abou-Zeid and Wiese 1998). For the specific application of this technique for measuring light absorption, the optical pathlength change is induced when the dissipation of the spectrally absorbed energy creates a temperature gradient.…”
Section: Theorymentioning
confidence: 99%