2003
DOI: 10.1117/12.520762
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Interferometer systems in machine industry

Abstract: In the report the arrangements of laser interferometers for machine industry are presented; the laser interferometer LSP3O for investigation of geometry of machine tools, the setup for inspection of ball screw and laser liner for CNC machine. Outstanding feature of the interferometers is the stabilization system of laser frequency using surface stabilized ferroelectric liquid cells (SSFLC).

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Cited by 3 publications
(2 citation statements)
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“…The instruments can be used in various cases [6][7][8][9] providing a set of geometric data as described, for example, in [10,11]. Still, one of the most versatile ______________ instruments for checking CNC geometry are systems based on laser interferometers [12]. For many years, interferometers have been the benchmark instrument for length measurement.…”
Section: Introductionmentioning
confidence: 99%
“…The instruments can be used in various cases [6][7][8][9] providing a set of geometric data as described, for example, in [10,11]. Still, one of the most versatile ______________ instruments for checking CNC geometry are systems based on laser interferometers [12]. For many years, interferometers have been the benchmark instrument for length measurement.…”
Section: Introductionmentioning
confidence: 99%
“…The problem of measuring the geometry of CNC machines has been described many times in the literature, such as [7][8]. One non-trivial problem is measuring the straightness of a machine or machine axis.…”
mentioning
confidence: 99%