Interference scheme with transverse shift of beams for remote precision monitoring of parameters of optical elements

Abstract

In this paper, we present a new interference scheme with transverse shift of beams for remote monitoring of parameters of optical elements. The results of studying the measurement accuracy are given and the main noise sources of the presented scheme are considered. The advantages of this scheme are the high accuracy (the experimentally realized accuracy is higher than λ/3000, where λ is the wavelength of the sounding radiation), high speed allowing us to study nonstationary processes, and selectivity ensuring the study of a given surface by using other optical elements of the scheme.

Optical interference methods of subwavelength-resolution imaging

“…Consider the solution of the first problem. In the classical interferometry, phase-shifting techniques [9,10] are used to unambiguously determine the amplitude and phase distributions of the light field from the interference patterns, i.e., the difference of phases of the measured field and the reference wave is modulated. In the proposed scheme, the phase-shifting techniques cannot be applied in their conventional interpretation since the structure of the near field is strongly dependent on the distance to the surface.…”

“…10 for one mask position. To simulate the actual measurements, these distributions were added with a noise corresponding to the relative accuracy of their measurements level of 1/500, which is currently the usual accuracy for phase-shifting interferometers [9,10]. It is seen in Fig.…”