Interference of the Luminescent Glow of Silicon Dioxide during Reactive Ion-Plasma Etching**

Abramov, A. V.; Pankratova, E. A.; Surovtsev, I. S.

doi:10.1007/s10812-020-00985-5

J Appl Spectrosc

2020

DOI: 10.1007/s10812-020-00985-5

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Interference of the Luminescent Glow of Silicon Dioxide during Reactive Ion-Plasma Etching**

A. V. Abramov

E. A. Pankratova

I. S. Surovtsev

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Interference of the Luminescent Glow of Silicon Dioxide during Reactive Ion-Plasma Etching**

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References 4 publications

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