2019 IEEE 21st Electronics Packaging Technology Conference (EPTC) 2019
DOI: 10.1109/eptc47984.2019.9026712
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Interfacial Reactions of Cu and In for Low-Temperature Processes

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Cited by 3 publications
(1 citation statement)
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“…Ga + focused ion beam (FIB) tools have been applied with some success to the preparation of cross-sections of low melting point metals (Tu & Zeng, 2002;Deppisch et al, 2006;Cheng et al, 2009;Tian et al, 2009aTian et al, , 2014Dang et al, 2012;Matsushima et al, 2013;Chou & Williams, 2014;de Morais et al, 2014;Soussan et al, 2015;Wang & Kao, 2019). There have not been any reports of the use of Xe + plasma focused ion beam (PFIB) applications to low melting point metal sample preparation.…”
Section: Introductionmentioning
confidence: 99%
“…Ga + focused ion beam (FIB) tools have been applied with some success to the preparation of cross-sections of low melting point metals (Tu & Zeng, 2002;Deppisch et al, 2006;Cheng et al, 2009;Tian et al, 2009aTian et al, , 2014Dang et al, 2012;Matsushima et al, 2013;Chou & Williams, 2014;de Morais et al, 2014;Soussan et al, 2015;Wang & Kao, 2019). There have not been any reports of the use of Xe + plasma focused ion beam (PFIB) applications to low melting point metal sample preparation.…”
Section: Introductionmentioning
confidence: 99%