2011
DOI: 10.1038/nnano.2011.96
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Interfacial phase-change memory

Abstract: Phase-change memory technology relies on the electrical and optical properties of certain materials changing substantially when the atomic structure of the material is altered by heating or some other excitation process. For example, switching the composite Ge(2)Sb(2)Te(5) (GST) alloy from its covalently bonded amorphous phase to its resonantly bonded metastable cubic crystalline phase decreases the resistivity by three orders of magnitude, and also increases reflectivity across the visible spectrum. Moreover,… Show more

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Cited by 655 publications
(619 citation statements)
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“…An impressive achievement has been accomplished when it was realized that PCM memory cells based on superlattices (SLs), structures made of alternating GeTe and Sb 2 Te 3 layers, showed dramatically improved performance in terms of reduced switching energies with ultra-low energy consumption, enhanced write-erase cycle lifetimes, and faster switching speeds. [5][6][7] However, high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) investigations carried out on molecular beam epitaxy (MBE) grown Sb 2 Te 3 /GeTe SLs 8 have shown that the constituting materials intermix at the interfaces, forming alternating layers of Sb 2 Te 3 and natural Ge x Sb 2 Te 3+x (GST) 9 blocks with 7-to 15-atomic layers randomly distributed along the growth direction. Such phenomenon, explained in terms of the different bonding dimensionality of GeTe and Sb 2 Te 3 , is thermodynamically driven and therefore it cannot be easily controlled during the growth.…”
Section: © 2017 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…An impressive achievement has been accomplished when it was realized that PCM memory cells based on superlattices (SLs), structures made of alternating GeTe and Sb 2 Te 3 layers, showed dramatically improved performance in terms of reduced switching energies with ultra-low energy consumption, enhanced write-erase cycle lifetimes, and faster switching speeds. [5][6][7] However, high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) investigations carried out on molecular beam epitaxy (MBE) grown Sb 2 Te 3 /GeTe SLs 8 have shown that the constituting materials intermix at the interfaces, forming alternating layers of Sb 2 Te 3 and natural Ge x Sb 2 Te 3+x (GST) 9 blocks with 7-to 15-atomic layers randomly distributed along the growth direction. Such phenomenon, explained in terms of the different bonding dimensionality of GeTe and Sb 2 Te 3 , is thermodynamically driven and therefore it cannot be easily controlled during the growth.…”
Section: © 2017 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…A thin film of the phasechange material 10 (PCM) Ge 2 Sb 2 Te 5 (GST), which is commonly encountered in optical and electrical data storage applications [11][12][13][14] , is used to switch the resonant frequency and Q-factor of the microring resonator. GST shows high optical contrast between its amorphous, covalently bonded, and crystalline, resonantly bonded, structural phases [15][16][17][18] (n cryst − n amorph = 2.5 ; k cryst − k amorph = 1 at 1.55 µm) 19 .…”
mentioning
confidence: 99%
“…If one considers the out-of-equilibrium nature of the sputter deposition process, then small differences between the optical properties of the as-deposited amorphous state and the laser reamorphized state are to be expected. Indeed it is normally necessary to cycle GST data storage devices more than 100 times before the electrical properties of the amorphous state converge to a stable value 14 . Table II also shows a clear effect of the amorphous to crystalline phase transition on the transmission.…”
mentioning
confidence: 99%
“…[12]. Following this trend, phase-change heterostructures had been produced, showing to function with improved performances [13]. Here we focus on chalcogenide superlattice (CSL) films made by high temperature deposition of alternating nm-size layers of GeTe and Sb 2 Te 3 [14].…”
Section: Introductionmentioning
confidence: 99%