Abstract:Y2O3 and HfYOx (~12nm) high dielectric constant films, with RF sputtering, have been prepared and studied with respect to their chemical bonding and electrical properties. The rapid thermal annealing after high-k dielectric deposition in N2 ambient showed major impacts on crystalinity properties. The incorporation of Hf into Y2O3 causes reduction in generation of positive oxide charge and leakage current density. The mechanism of leakage current reduction is considered to be due to Hf-induced compensation of e… Show more
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