2020
DOI: 10.1016/j.apsusc.2020.147199
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Interface asymmetry in AlN/Ni and Ni/AlN interfaces: A study using resonant soft X-ray reflectivity

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Cited by 12 publications
(8 citation statements)
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“…Structural parameters of Ni/AlN/Ni waveguide [9] are optimized from the EFI calculations using recursive formalism given by de Boer et al [3]. Thickness of all layers are varied to obtain maximum intensity enhancement for TE0 mode inside the AlN guiding layer.…”
Section: Optimization Of Structural Parameters: Electric Field Intens...mentioning
confidence: 99%
See 1 more Smart Citation
“…Structural parameters of Ni/AlN/Ni waveguide [9] are optimized from the EFI calculations using recursive formalism given by de Boer et al [3]. Thickness of all layers are varied to obtain maximum intensity enhancement for TE0 mode inside the AlN guiding layer.…”
Section: Optimization Of Structural Parameters: Electric Field Intens...mentioning
confidence: 99%
“…The slight change in resonant angle occurs due to deviation of structural parameters of the deposited sample from the optimized ones and/or to the uncertainties involved in the measurements. Taking cue from the previous study [9], the XRR data is analyzed using a six-layered model consisting of Ni cladding layers, AlN guiding layer, a surface layer due to oxidation/contamination, an interfacial layer at AlN-on-Ni interface and another interfacial layer at Ni-on-Si interface. Thickness, roughness, and optical densities (δ) of all the layers are varied till satisfactory fit to measured data is obtained using Chi-square minimization procedure.…”
Section: Investigations On Surface-interface Properties Of As Deposit...mentioning
confidence: 99%
“…and interface characterization of multilayered thin film samples having sufficient electron density contrast and thicknesses more than few nanometres. 2,3 In XRR measurements, beam intensity reflected from a sample is measured as a function of grazing incidence angle. As the reflected intensity is proportional to electron density contrast between different layers, therefore, XRR provides electron density versus depth information of layered system in direction perpendicular to the sample surface.…”
Section: X-ray Reflectivity (Xrr) Is a Well-established Technique For Surfacementioning
confidence: 99%
“…A high binding strength between AlN and transition metals is critical to its application as a DPC substrate. Metals such as Ti, Al, Cu, and Zr are often sputtered to serve as interface materials between Cu and ceramic substrates in DPC ceramic substrates [3][4]. Several researchers have investigated the thermal cycle load and delamination failure of AlN substrates through experimental studies.…”
Section: Introductionmentioning
confidence: 99%