Interface and control electronics for a bulk micromachined capacitive gyroscope

Saukoski, M.; Aaltonen, Lasse; Salo, T.; Halonen, K.

doi:10.1016/j.sna.2008.03.023

Cited by 40 publications

(17 citation statements)

References 9 publications

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“…They suggest that the potential exists to tune the oscillators however there is no feedback to the mechanical system. In a system for resonant gyroscopes presented by Saukoski [9], there are two control loops, one to drive the resonator and another one for compensation. However, although the resonator part looks like a PLL, this approach does not utilize a frequency that is generated from a variable oscillator.…”

Section: Introductionmentioning

confidence: 99%

Fully differential electro-mechanical phase locked loop sensor circuit

Rudolf

Wilson

et al. 2013

Sensors and Actuators A: Physical

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Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity.Electro-mechanical Sigma Delta modulators (EMΣ∆) have been proposed for this reason and high order loops have been shown to enjoy a good signal to noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMΣ∆s is a challenging task and in practice stability can be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel differential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the deflection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMΣ∆s for high performance MEMS sensors. Preliminary research suggests that this novel approach will

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Section: Introductionmentioning

confidence: 99%

Fully differential electro-mechanical phase locked loop sensor circuit

Rudolf

Wilson

et al. 2013

Sensors and Actuators A: Physical

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“…However, the capacitance change of the conventional MEMS gyroscopes is extremely low (femto-or atto-farad order). (3)(4)(5)(6) For example, an initial capacitance and capacitance change by the applied angular velocity in ADXRS300 (Analog Devices Inc.) are 460 fF and 0.7 aF/deg/s, respectively. The detecting circuit should detect a capacitance change of 1.5×10 −4 %/deg/s.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1 shows a schematic of a conventional RLG. (6) He-Ne gas is encapsulated in the narrow cavity made of a nonthermal expansion glass. The He-Ne gas is excited and discharged between the anodes and cathodes.…”

Section: Introductionmentioning

confidence: 99%

Angular Velocity Sensor Using Winking Phenomenon in Solid-State Ring Resonator

2011

Sensors and Materials

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Key words: winking phenomenon, ring laser gyroscope, semiconductor optical amplifi erIn this paper, we describe a novel type of ring laser gyroscope (RLG) using the winking phenomenon. Conventional sensing methods of gyroscopes are categorized into vibrating-type gyroscopes using the Coriolis force and optical-type gyroscopes using the Sagnac effect. The novel type of gyroscope presented here utilizes the winking phenomenon. The winking phenomenon is intensity changes of circulatory counter propagating lasers with an applied angular velocity. The advantage is that the intensity change caused by the winking phenomenon is more than 100 times larger than the capacitance change of conventional gyroscopes in micro-electromechanical systems (MEMS) technology. The detecting circuits for the winking phenomenon become simple compared with the vibrating MEMS gyroscope, because the circuits of the MEMS gyroscopes should detect a capacitance change of 1.5×10 −4 %/deg/s, which corresponds to 0.7 aF/deg/s. The novel RLG using the winking phenomenon does not have a deadband because the intensity changes are linearly observed at a small to middle angular velocity. Thus, a mechanical dither is not required like in a conventional RLG using a He-Ne laser. In the experiments, an RLG including a semiconductor optical amplifi er (SOA), mirrors, and beam splitters is assembled to observe the winking phenomenon. The basic characteristics of laser intensity vs. injection current and wavelength spectra were confi rmed and the winking phenomenon was observed when an angular velocity was applied to the RLG. We observed that the change in laser intensity is 1.9×10 −2 %/deg/s.

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“…MEMS actuators are integrated devices that generate motion by coupled physics field's interactions, typically through piezoelectric, electrostatic or electromagnetic effects. Examples of such MEMS can be found in inkjet printer heads, scanning probe microscopes, miniature mechanical switches and game controllers [3][4][5]. Electrothermal actuators present a class of conventional MEMS devices with great potential for science and applications.…”

Section: Introductionmentioning

confidence: 99%