Interdigitated microelectrode arrays based on sputtered carbon thin-films

Fiaccabrino, G. C.; Tang, X.-M.; Skinner, N.; Rooij, N. F. de; Koudelka‐Hep, M.

doi:10.1016/s0925-4005(97)80063-9

Cited by 41 publications

(25 citation statements)

References 20 publications

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“…Typically, DEP is most readily observed for particles with a diameter range of around 1-1000 m. Since cells [9]- [17], bacteria [18]- [20], microbeads [21]- [24], and nanowires [25] fall within this range of mean particle diameter, they can be very effectively manipulated in fluidics using DEP. By scaling down the IDAs to nanoscale, it is also possible to manipulate nanoparticles such as the biomolecule [26], [27] and nanoscopic latex beads [28], [29].…”

Section: Introductionmentioning

confidence: 99%

“…Many researchers have reported that IDAs have an improved signal-to-noise ratio for reversible or quasi-reversible charge transfer response because of the redox cycling arising from the close proximity of the interdigitated electrodes [29]- [34]. IDAs are also very prominent as the impedimetric biosensor for the direct detection of impedance change including capacitance, dielectric constant, and bulk conductivity in fluids.…”

Section: Introductionmentioning

confidence: 99%

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A Polymer Microfluidic Chip With Interdigitated Electrodes Arrays for Simultaneous Dielectrophoretic Manipulation and Impedimetric Detection of Microparticles

2008

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This paper presents the design, fabrication, and characterization of a polymer microfluidic biochip with integrated interdigitated electrodes arrays (IDAs) used to simultaneously separate, manipulate, and detect microparticles using dielectrophoresis (DEP) and electrochemical impedance spectroscopy (EIS) methods. The DEP response of silica microspheres has been characterized, and microspheres of different sizes (1.8 and 3.5 m in diameter) have been DEP flow separated and individually trapped in different microchambers by IDAs in a single run. Simultaneously, the impedance change caused by microspheres captured on IDAs has been analyzed for quantification. High-throughput polymer microfabrication techniques such as micro injection molding were used in this work, so that the polymer microfluidic chip can be produced in a low-cost, disposable platform. This low-cost microfluidic chip provides a generic platform for developing multifunctional lab-on-a-chip devices that require the ability to handle and sense microparticles.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Polymer Microfluidic Chip With Interdigitated Electrodes Arrays for Simultaneous Dielectrophoretic Manipulation and Impedimetric Detection of Microparticles

2008

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“…Amorphous carbon is of particular interest as it can be deposited at room temperature, allowing it to be integrated with other materials14 such as quartz crystal microbalances,13 electrodes,15 and metal thin films without perturbing their structure. The utility of a multilayered substrate containing a metal thin film and an amorphous carbon overlayer is shown here by their use for in situ synthesis of oligonucleotide arrays, which are then employed in the analysis of biomolecule binding processes with SPRi (Figure 1).…”

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confidence: 99%

Carbon-on-Metal Films for Surface Plasmon Resonance Detection of DNA Arrays

et al. 2008

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Surface plasmon resonance (SPR) measurements provide a highly sensitive means for detecting biomolecular interactions in a label-free manner. Numerous studies of biomolecular interactions have been performed with fixed-angle SPR imaging (SPRi) on surfaces patterned with a variety of biomolecules such as DNA, RNA, proteins, and peptides. 1 Arrays increase the information obtainable in a single experiment as multiple reactions can be monitored in parallel.A current and significant limitation of SPR is that the substrate must be a metal thin film. A number of metal thin films are capable of supporting surface plasmons in the near-infrared and visible regions of the electromagnetic spectrum. 2,3 Gold surfaces have been the substrate of choice for SPR measurements for two reasons: gold is relatively stable in the aqueous environments needed for monitoring biomolecular interactions and a versatile chemistry based on the attachment of sulfur-containing ligands to the gold surface has been developed and wellcharacterized. The readily formed gold-sulfur bond enables the direct attachment of ligands to the gold surface 4 as well as attachment via an intermediate self-assembled monolayer (SAM). 5-7 This gold-thiol chemistry has made possible the routine analysis of aqueous binding processes to immobilized molecules at near-neutral pH values and moderate temperatures. The susceptibility of the gold-sulfur bond to oxidation and photodecomposition has prevented SPR sensing from finding utility in areas such as on-surface combinatorial chemistry (due to the harsh chemical conditions employed) and photolithography (due to the adverse effects of ultraviolet radiation on the gold-sulfur bond). 8Here we describe the development of a lamellar structure in which a thin layer of amorphous carbon is deposited onto a surface plasmon-active gold thin film (Figure 1a). Carbon-based surfaces are readily modified with biomolecules of interest using a well-developed and robust chemistry, based upon the attachment of alkene-containing molecules to the substrate through the UV light-mediated formation of carbon-carbon bonds. 9 Recently, a similar lamellar structure utilizing a thin silicate overlayer was used to fabricate and monitor supported bilayer membranes with SPR. 10 E-mail: smith@chem.wisc.edu. Arrays prepared on functionalized carbon-based substrates such as diamond thin films, 11,12 glassy carbon, 12 and amorphous carbon thin films 13 have superior stability to analogous arrays prepared on functionalized glass, silicon, and gold substrates. Amorphous carbon is of particular interest as it can be deposited at room temperature, allowing it to be integrated with other materials 14 such as quartz crystal microbalances, 13 electrodes, 15 and metal thin films without perturbing their structure. The utility of a multilayered substrate containing a metal thin film and an amorphous carbon overlayer is shown here by their use for in situ synthesis of oligonucleotide arrays, which are then employed in the analysis of biomolecule binding proces...

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“…The upstream chamber was packed with enzyme-modified porous glass beads for glucose oxidation. The second chamber contained the electrode arrays for electrochemiluminescence (ECL) detection of the hydrogen peroxide produced, each consisting of 125 pairs of 1-mm-long, 3.2-m-wide electrodes, with an electrode spacing of 0.8 m. To obtain these detectors, the electrodes were defined on a sputtered thin film of carbon with a standard photolithographic procedure, followed by structuring of the carbon layer using an O plasma [135], [136]. The flow chambers were defined after electrode fabrication by photolithography in a thick layer (300 m) of Epon-SU 8 [135].…”

Section: A Electrochemical Detection In Microfluidic Chipsmentioning

confidence: 99%

Microfluidics meets MEMS

2003

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The use of planar fluidic devices for performing small-volume chemistry was first proposed by analytical chemists, who coined the term "miniaturized total chemical analysis systems" (TAS) for this concept. More recently, the TAS field has begun to encompass other areas of chemistry and biology. To reflect this expanded scope, the broader terms "microfluidics" and "lab-on-a-chip" are now often used in addition to TAS. Most microfluidics researchers rely on micromachining technologies at least to some extent to produce microflow systems based on interconnected micrometer-dimensioned channels. As members of the microelectromechanical systems (MEMS) community know, however, one can do more with these techniques. It is possible to impart higher levels of functionality by making features in different materials and at different levels within a microfluidic device. Increasingly, researchers have considered how to integrate electrical or electrochemical function into chips for purposes as diverse as heating, temperature sensing, electrochemical detection, and pumping. MEMS processes applied to new materials have also resulted in new approaches for fabrication of microchannels. This review paper explores these and other developments that have emerged from the increasing interaction between the MEMS and microfluidics worlds.

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Interdigitated microelectrode arrays based on sputtered carbon thin-films

Cited by 41 publications

References 20 publications

A Polymer Microfluidic Chip With Interdigitated Electrodes Arrays for Simultaneous Dielectrophoretic Manipulation and Impedimetric Detection of Microparticles

A Polymer Microfluidic Chip With Interdigitated Electrodes Arrays for Simultaneous Dielectrophoretic Manipulation and Impedimetric Detection of Microparticles

Carbon-on-Metal Films for Surface Plasmon Resonance Detection of DNA Arrays

Microfluidics meets MEMS

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