The measurement of nitrogen monoxide (NO) concentration levels is a vital aspect of environmental analysis and the so called CHNS analysis. The chemiluminescent reaction with ozone in the gas phase is a well-established method for the measurement of atmospheric concentration levels in the range from 4 ppb up to 100 ppm.
In this contribution we present the design of a so called micro total analytical system (μTAS) for NO measurements designed in ceramic. Low temperature co-fired ceramics (LTCC) have proven to be the ideal technology, since they offer high chemical and thermal stability as well as high degree of freedom of design. The article gives an overview of the design process with emphasis on manufacture of the components and technological challenges regarding life-time.