Inter-digital capacitors with aerosol-deposited high-K dielectric layer for highest capacitance value in capacitive super-sensing applications

Abstract

Inter-digital capacitors (IDCs) with aerosol-deposition (AD) high-k dielectric layer were compared via simulation and measurements of bare IDCs and AD IDCs at room temperature and subjected to a post-annealing process for realizing capacitive super-sensing applications. IDCs with thin AD films can provide higher capacitive intensity and improvements for other dielectric performances. Therefore, IDC patterns with AD high-k dielectric layers were fabricated by varying the finger widths and gap. Moreover, we analyzed the layer microstructure design patterns using simulations and experiments with AD BaTiO3 as-deposited IDCs and IDCs subjected to annealing at 500 °C. These three different IDCs were measured using an impedance analyzer; furthermore, the AD BaTiO3 films were evaluated using X-ray diffraction, atomic force microscopy, and traveling electron microscopy. The results for the IDCs with the AD BaTiO3 film show the highest capacitance when compared with other thin layer capacitors, which is expected to be useful in realizing super-sensing applications in the future.

Temperature‐induced changes of the electrical and mechanical properties of aerosol‐deposited BaTiO3 thick films for energy storage applications

“…Annealing can reduce the deposition process‐induced stress in AD‐BT films, indicated by a change in lattice distortion and hence, peak position. This is in good agreement with our previous work and can be observed in other oxide ceramic AD films 38,48–50 . Moreover, a change in peak width can be correlated to the change in crystallite size.…”

“…This is in good agreement with our previous work and can be observed in other oxide ceramic AD films. 38,[48][49][50] Moreover, a change in peak width can be correlated to the change in crystallite size. However, for AD-BT films, it was found that annealing at 500 • C does not induce significant change in crystallite size.…”

Ultrasensitive and Reusable Graphene Oxide-Modified Double-Interdigitated Capacitive (DIDC) Sensing Chip for Detecting SARS-CoV-2

“…For making an efficient DIDC-based biosensor, dielectric constant, charge distribution, and conductivity of DIDC were observed to be of high significance. Importantly, the changes in these sensing parameters correspond to the capacitive reactance of the DIDC. ,, In this research, we envisioned a capacitance immunosensor composed of anti-SARS-CoV-2 Abs functionalized via 1-ethyl-3-(3-dimethylaminopropyl)­carbodiimide– N -hydroxy succinimide (EDC-NHS) coupling on the GrO-DIDC-based SiO 2 substrate . In this process, EDC-NHS (cross-linker) was attached via covalent bonds onto the GrO substrate for the functionalization of anti-SARS-CoV-2 Abs.…”

Making powder aerosol deposition accessible for small amounts: A novel and modular approach to produce dense ceramic films

“…[25][26][27][28][29][30][31][32] Furthermore, a variety of sensors was published using powder aerosol deposited functional films. [33][34][35][36][37][38] A more detailed description of the aerosol deposition process, its deposition mechanism, and the resulting film properties can be found in overview articles of Akedo's group 39,40 and of our group. 2 Developments in the past decade pointed towards a better understanding of the deposition mechanism, 10,[41][42][43][44] possible applications, 36,40,[45][46][47][48] and a scale-up of the spray process.…”

“…Already realized electrochemical applications are photocatalytic ceramics 11–17 like TiO 2 , GaN–ZnO, and BiVO 4 , as well as energy storage and conversion devices like fuel cells, 18–22 thermoelectric generators, 23,24 and batteries 25–32 . Furthermore, a variety of sensors was published using powder aerosol deposited functional films 33–38 . A more detailed description of the aerosol deposition process, its deposition mechanism, and the resulting film properties can be found in overview articles of Akedo's group 39,40 and of our group 2…”