We report the morphological and compositional characteristics and their effect on optical properties of Er-doped GaN grown by solid source molecular beam epitaxy on sapphire and hydride vapor phase epitaxy GaN substrates. The GaN was grown by molecular beam epitaxy on sapphire substrates using solid sources ͑for Ga, Al, and Er͒ and a plasma gas source for N 2 . The emission spectrum of the GaN:Er films consists of two unique narrow green lines at 537 and 558 nm along with typical Er 3ϩ emission in the infrared at 1.5 m. The narrow lines have been identified as Er 3ϩ transitions from the 2 H 11/2 and 4 S 3/2 levels to the 4 I 15/2 ground state. The morphology of the GaN:Er films showed that the growth resulted in either a columnar or more compact structure with no effect on green light emission intensity. © 1999 American Vacuum Society. ͓S0734-211X͑99͒06303-9͔The optical properties of rare earth ͑RE͒ elements ͑such as Nd, Er, Pr͒ have led to many important photonic applications, including solid state lasers, telecommunications ͑opti-cal fiber amplifiers, fiber lasers͒, optical storage devices, displays. In most of these applications the host materials for the REs were various forms of oxide and nonoxide glasses. The emission can occur at visible or infrared ͑IR͒ wavelengths depending on the electronic transitions of the selected RE element and the excitation mechanism. Semiconductors doped with REs such as Pr and Er have exhibited only the lowest excited state as an optically active transition. However, the presence of these transitions at IR wavelengths ͑1.3 and 1.54 m͒ coincident with minima in the optical loss of silica-based glass fibers utilized in telecommunications combined with the prospect of integration with semiconductor device technology has sparked considerable interest.The III-N semiconducting compounds are of particular interest as hosts for REs because of their direct band gap and high level of optical activity even under conditions of rather high defect density, which would quench emission in other smaller-gap III-V and wide-gap II-VI compounds. Examples of other RE-doped wide band gap semiconductors ͑WBGS͒ which have been reported include GaP, 1 SiC, 2 and III-V compounds.3 Advantages of WBGS over other semiconductors and glasses include chemical stability, carrier generation ͑to excite the rare earths͒, and physical stability over a wide temperature range. The doping of III nitrides ͑GaN, AlN͒ with Er by molecular beam epitaxy ͑MBE͒ and metal-organic chemical vapor deposition ͑MOCVD͒ both during growth and postgrowth by ion implantation has been reported. [4][5][6][7][8][9][10][11] The successful in situ incorporation 12-14 of Er into AlN and GaN by MBE and its IR emission characteristics have been reported by other groups. None of these articles in the literature report emission in the visible range from Er-doped III-nitrides. Recently, our group has reported 15-18 the in situ incorporation of Er into GaN by MBE on both sapphire and silicon leading to room temperature visible and IR emission b...