Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing

Ko, Hyo-Heon; Kim, Jun-Seok; Kim, Jihyun; Baek, Jun-Geol; Kim, Sung-Shick

doi:10.1016/j.eswa.2010.12.073

Cited by 6 publications

(2 citation statements)

References 13 publications

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“…This is similar to the deadband control method [16], where instead of having a fixed reference point, an operating range is set. If the response is in this range, the controller does not exert any correction.…”

Section: Methodsmentioning

confidence: 99%

Force Feedback Control For Dexterous Robotic Hands Using Conditional Postural Synergies

Dimou

Santos-Victor

Moreno

2022

2022 IEEE-RAS 21st International Conference on Humanoid Robots (Humanoids)

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We present a force feedback controller for a dexterous robotic hand equipped with force sensors on its fingertips. Our controller uses the conditional postural synergies framework to generate the grasp postures, i.e. the finger configuration of the robot, at each time step based on forces measured on the robot's fingertips. Using this framework we are able to control the hand during different grasp types using only one variable, the grasp size, which we define as the distance between the tip of the thumb and the index finger. Instead of controlling the finger limbs independently, our controller generates control signals for all the hand joints in a (lowdimensional) shared space (i.e. synergy space). In addition, our approach is modular, which allows to execute various types of precision grips, by changing the synergy space according to the type of grasp. We show that our controller is able to lift objects of various weights and materials, adjust the grasp configuration during changes in the object's weight, and perform object placements and object handovers.

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Section: Methodsmentioning

confidence: 99%

Force Feedback Control For Dexterous Robotic Hands Using Conditional Postural Synergies

Dimou

Santos-Victor

Moreno

2022

2022 IEEE-RAS 21st International Conference on Humanoid Robots (Humanoids)

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“…In this sense, several works have been developed with the aim to improve the behavior and consequently make the process more optimal. For instance (Ko et al, 2011) proposes an efficient control method to minimize process error and to reduce process variance in semiconductor manufacturing, in Chen et al (2008) is described an intelligent adaptive control system for multiple-input multipleoutput (MIMO) uncertain nonlinear systems and, in Etik et al (2009) is showed a controlled fuzzy expert system to provide the conditions necessary for operating rooms. Depending of the control technique used different results are achieved.…”

Section: Introductionmentioning

confidence: 99%

A hybrid intelligent system for PID controller using in a steel rolling process

Calvo-Rolle

Casteleiro‐Roca

Quintián

et al. 2013

Expert Systems with Applications

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With the aim to improve the steel rolling process performance, this research presents a novel hybrid system for selecting the best parameters for tuning in open loop a PID controller. The novel hybrid system combines rule based system and Artificial Neural Networks. With the rule based system, it is modeled the existing knowledge of the PID controller tuning in open loop and, with Artificial Neural Network, it is completed the rule based model that allow to choose the optimal parameters for the controller. This hybrid model is tested with a long dataset to obtain the best fitness. Finally, the novel research is validated on a real steeling roll process applying the hybrid model to tune a PID controller which set the input speed in each of the gearboxes of the process.

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EWMA-PRIM: Process optimization based on time-series process operational data using the exponentially weighted moving average and patient rule induction method

Kim

Lee

Kim

2022

Expert Systems with Applications

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Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing

Cited by 6 publications

References 13 publications

Force Feedback Control For Dexterous Robotic Hands Using Conditional Postural Synergies

Force Feedback Control For Dexterous Robotic Hands Using Conditional Postural Synergies

A hybrid intelligent system for PID controller using in a steel rolling process

EWMA-PRIM: Process optimization based on time-series process operational data using the exponentially weighted moving average and patient rule induction method

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