Integration of trench-isolated through-wafer interconnects with 2d capacitive micromachined ultrasonic transducer arrays

Zhuang, Xuefeng; Ergun, A.S.; Huang, Yongli; Wygant, I.O.; Oralkan, Ömer; Khuri‐Yakub, Butrus T.

doi:10.1016/j.sna.2007.04.008

Cited by 33 publications

(14 citation statements)

References 23 publications

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“…In 1999, they developed air-coupled nondestructive evaluation using micromachined ultrasonic transducers [9]. In 2002, Oralkan et al from Stanford University developed a linear CMUT array and a 2D CMUT array which could implement 3D ultrasonic imaging [10,11] and also conducted preliminary simulation experiments on imaging [12,13]. In 2006, Caronti et al developed a one-dimensional array of ultrasonic transducers and detectors used in medical ultrasonic imaging [14].…”

Section: Introductionmentioning

confidence: 99%

A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

et al. 2016

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Capacitive micromachined ultrasonic transducers (CMUTs) are one of the promising MEMS devices. This paper proposed an integrated vibration membrane structure to design a two-dimensional CMUT linear array for underwater applications. The operation frequencies for different medium have been calculated and simulated, which are 2.5 MHz in air and 0.7 MHz in water. The directivity analyses for the CMUT cell, subarray, and linear array have been provided. According to the product theorems, the directivity function of the complex array is obtained using a combination of the directivity functions of certain simple structures. Results show that the directivity of a CMUT cell is weak due to the small size, but the directivity of the designed linear array is very strong. Influential parameters of the linear array have been discussed, including the cell numbers, the adjacent distance, and the operation medium. In order to further suppress the side lobe interference and improve the resolution and the imaging quality of the imaging system, several weighting methods are used for optimization and comparison. Satisfactory side lobe suppression results are obtained, which can meet the actual requirements.

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Section: Introductionmentioning

confidence: 99%

A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

et al. 2016

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“…Through-silicon interconnects have been used with cMUT arrays to integrate the transducers with other integrated circuitry [17], [18]. PZT matrix arrays have also been fabricated on silicon multilayer interconnect circuits but required rigid substrate length of nearly 5 cm [19].…”

Section: Introductionmentioning

confidence: 99%

In vivo real-time 3-D intracardiac echo using PMUT arrays

Dausch

Gilchrist

Carlson

et al. 2014

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

100

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Piezoelectric micromachined ultrasound transducer (PMUT) matrix arrays were fabricated containing novel through-silicon interconnects and integrated into intracardiac catheters for in vivo real-time 3-D imaging. PMUT arrays with rectangular apertures containing 256 and 512 active elements were fabricated and operated at 5 MHz. The arrays were bulk micromachined in silicon-on-insulator substrates, and contained flexural unimorph membranes comprising the device silicon, lead zirconate titanate (PZT), and electrode layers. Through-silicon interconnects were fabricated by depositing a thin-film conformal copper layer in the bulk micromachined via under each PMUT membrane and photolithographically patterning this copper layer on the back of the substrate to facilitate contact with the individually addressable matrix array elements. Cable assemblies containing insulated 45-AWG copper wires and a termination silicon substrate were thermocompression bonded to the PMUT substrate for signal wire interconnection to the PMUT array. Side-viewing 14-Fr catheters were fabricated and introduced through the femoral vein in an adult porcine model. Real-time 3-D images were acquired from the right atrium using a prototype ultrasound scanner. Full 60° × 60° volume sectors were obtained with penetration depth of 8 to 10 cm at frame rates of 26 to 31 volumes per second.

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“…In 1994, Khuri-Yakub, research group of Stanford, E.L. Ginzton Laboratory (Stanford, CA, USA) used surface micromachined technology to produce a micro capacitive ultrasonic transducer [16], and in 1999, the same team developed air-coupled nondestructive evaluation using micromachined ultrasonic transducers [17]. In 2002, a linear CMUT array was developed by Oralkan et al from Stanford University, and then the team developed a 2D CMUT array which could implement 3D ultrasonic imaging [18][19][20][21][22][23][24][25][26][27][28], and conducted preliminary simulation experiments on imaging. In 2006, Caronti et al developed a one-dimensional array of ultrasonic transducers and detectors used in medical ultrasonic imaging [29].…”

Section: Introductionmentioning

confidence: 99%

Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

Wang

et al. 2014

Micromachines

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An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS) based capacitive ultrasonic transducer and a linear array based on the transducer. Through directivity analysis, it can be found that its directivity is weak due to the small size of the designed transducer, but the directivity of the designed linear array is very strong. In order to further suppress the sidelobe interference and improve the resolution of the imaging system and imaging quality, the Dolph-Chebyshev weighting method and the Taylor weighting method are used to process −40dB sidelobe suppression, and satisfactory results are obtained, which can meet actual requirements.

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Integration of trench-isolated through-wafer interconnects with 2d capacitive micromachined ultrasonic transducer arrays

Cited by 33 publications

References 23 publications

A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

In vivo real-time 3-D intracardiac echo using PMUT arrays

Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

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