Integration of the volume segmentation method into an optimization process: application to the sizing of a micro-actuator for deformable mirrors

Rakotoarison, Harijaona Lalao; Würtz, Fréderic; Stĕpánek, J.; Delinchant, Benoît; Cugat, Orphée

doi:10.1109/tmag.2006.871623

Cited by 2 publications

(2 citation statements)

References 6 publications

(6 reference statements)

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“…These magnetic arrangements were not designed to be individually driven, but collectively actuated by a magnetic field. Rakotoarison also proposed a deformable mirror supported by an array of individually driven microactuators [25].…”

Section: Principle Of the Devicementioning

confidence: 99%

“…Various studies of magnetostatic actuation systems were proposed in the literature. Rakotoarison proposed the comparison and optimization of two coil geometries used for actuation [25]. The first design had the magnet partially inserted into the coil; in the second design, the magnet was outside the coil, allowing a smaller inner diameter for the coil.…”

Section: Study Of the Actuation Systemmentioning

confidence: 99%

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Pulse-driven magnetostatic micro-actuator array based on ultrasoft elastomeric membranes for active surface applications

Streque

Talbi

Pernod

et al. 2012

J. Micromech. Microeng.

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An array of pulse-driven magnetostatic micro-actuators with 2 mm pitch is proposed for highly deformable active surfaces. A wide range of applications can benefit from such devices, from droplet manipulation and active flow control to tactile display, for which this device was initially designed. This design ensures robustness, ease of fabrication and mass production compatibility. The device is composed of an array of 4 × 4 highly resistant elastomeric membranes achieved using microfabrication techniques. The magnetostatic actuation system is based on the interaction between a miniature coil and a SmCo micro-magnet. This mechanism was optimized by the finite-element method, leading to the introduction of different ferromagnetic circuits. Mechanical characterizations were achieved by laser interferometry. The micro-actuators can be used either in continuous mode or in pulse mode, allowing wide bandwidth, from dc to 1.5 kHz, and vibration amplitudes up to 150 μm for instantaneous forces of 30 mN. The device has good actuation homogeneity with ±20% amplitude variations between its actuators; low crosstalk (<5%) was also demonstrated. Finally, an improved actuation design benefiting from electroplated NiFe thin films is proposed and characterized, increasing performances (forces and displacements) by 50%.

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Section: Principle Of the Devicementioning

confidence: 99%

Section: Study Of the Actuation Systemmentioning

confidence: 99%

Pulse-driven magnetostatic micro-actuator array based on ultrasoft elastomeric membranes for active surface applications

Streque

Talbi

Pernod

et al. 2012

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper — Permalloy electrodeposited structures

Streque

Talbi

Bonnerot

et al. 2012

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

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Integration of the volume segmentation method into an optimization process: application to the sizing of a micro-actuator for deformable mirrors

Cited by 2 publications

References 6 publications

Pulse-driven magnetostatic micro-actuator array based on ultrasoft elastomeric membranes for active surface applications

Pulse-driven magnetostatic micro-actuator array based on ultrasoft elastomeric membranes for active surface applications

Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper — Permalloy electrodeposited structures

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Integration of the volume segmentation method into an optimization process: application to the sizing of a micro-actuator for deformable mirrors

Cited by 2 publications

References 6 publications

Pulse-driven magnetostatic micro-actuator array based on ultrasoft elastomeric membranes for active surface applications

Pulse-driven magnetostatic micro-actuator array based on ultrasoft elastomeric membranes for active surface applications

Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper &#x2014; Permalloy electrodeposited structures

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Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper — Permalloy electrodeposited structures