Integration of Silicon Photonics into DRAM Process

Shin, Dongjae; Cho, K. S.; Ji, Ho-Chul; Lee, B. S.; Kim, S. G.; Bok, J. K.; Choi, Seong Hee; Shin, Yong-hwack; Kim, J. H.; Lee, S. Y.; Cho, K. Y.; Kuh, Bong Jin; Shin, Jungyeop; Lim, Ji Yeon; Kim, J. M.; Choi, Hanmei; Ha, K. H.; Park, Y. D.; Chung, Chilhee

doi:10.1364/ofc.2013.otu2c.4

Cited by 14 publications

(6 citation statements)

References 4 publications

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“…These implementations are carried out on different types of material platforms such as on bulk CMOS wafers [41], [91], sub-100 nm SOI [30], [44], [93] and 220 nm SOI platforms [27]. Moreover, various technology nodes such as 90 nm CMOS [94], 65 nm CMOS [92], 45 nm CMOS [93], 28 nm CMOS [97] and 250 nm BiCMOS [96], [98] are used for the implementation of monolithic EPICs.…”

Section: B Monolithic Silicon Photonics-electronics Co-integrationmentioning

confidence: 99%

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

et al. 2018

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Silicon Photonics is widely acknowledged as a gamechanging technology, driven by the needs of datacom and telecom. Silicon Photonics builds on highly capital-intensive manufacturing infrastructure, and mature open-access silicon photonics platforms are translating the technology from research fabs to industrial manufacturing levels. To meet the current market demands for silicon photonics manufacturing, a variety of openaccess platforms is offered by CMOS pilot lines, R&D institutes and commercial foundries. This paper presents an overview of existing and upcoming commercial and non-commercial openaccess silicon photonics technology platforms. We also discuss the diversity in these open-access platforms and their key differentiators.

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Section: B Monolithic Silicon Photonics-electronics Co-integrationmentioning

confidence: 99%

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

et al. 2018

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“…PIC25G SILICON PHOTONICS PLATFORM Most available silicon photonics platforms [4,5,6] monolithically integrate optical devices on the same silicon substrate used for electrical devices, thus exploiting the reduced cost and increased integration density of optical interconnects allowed by classical semiconductor technologies. However, the monolithic integration of optical with electrical functions suffers from intrinsic limits in terms of flexibility and scalability.…”

Section: IImentioning

confidence: 99%

A 3D-integrated 25Gbps silicon photonics receiver in PIC25G and 65nm CMOS technologies

Temporiti

Minoia

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et al. 2014

ESSCIRC 2014 - 40th European Solid State Circuits Conference (ESSCIRC)

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Silicon photonics platforms are emerging as attractive solutions for low power and cost effective short/medium-reach optical interconnects. To overcome the intrinsic limitations of monolithically integrated photonics with electronics, STMicroelectronics has developed a 3D-compatible silicon photonics platform that implements in the FEOL only optical devices. Photonics Integrated Circuits are made compatible with 3D assembly of Electronic Integrated Circuits through the use of copper pillars. In this paper we present a 25Gbps Opto-Electronic receiver operating at 1310nm wavelength, consisting of an integrated waveguide Germanium photodiode interfaced by means of copper pillars to a 65nm CMOS amplification chain. The receiver demonstrates an Average Optical Power sensitivity at photodiode input, at a BER of 10 -12 , of -11.9dBm with a PRBS7 input signal, corresponding to a 97μApp TIA input current. The achieved sensitivity is ~6dB better than state-of-the-art monolithically integrated silicon photonics receivers, at comparable TIA and LA power consumption.

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“…The large wafer size allows for a large number of compact dies per wafer at low-cost scaling to large commercial volumes in existing CMOS commercial fabs and R&D pilot lines. 39,[44][45][46][47][48] SiPh modulators promise to provide the best price-performance ratio and possible routes for monolithic integration of electronics and photonics. 2,21,22,39,49 The commercial launch of SiPh-enabled transceivers is a testament to the promise of SiPh as a photonic integration technology to deliver efficient high-speed modulators.…”

Section: Introductionmentioning

confidence: 99%

“…2,21,22,39,49 The commercial launch of SiPh-enabled transceivers is a testament to the promise of SiPh as a photonic integration technology to deliver efficient high-speed modulators. 3,[44][45][46][47][48][50][51][52] The push for performant high-speed modulators stems from the ever booming growth of internet traffic. This growth has driven the modern data centers (DCs) into the so-called "Zettabyte Era," where the annual global traffic is expected to exceed 2.2 zettabytes/year.…”

Section: Introductionmentioning

confidence: 99%

Taking silicon photonics modulators to a higher performance level: state-of-the-art and a review of new technologies

et al. 2021

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Optical links are moving to higher and higher transmission speeds while shrinking to shorter and shorter ranges where optical links are envisaged even at the chip scale. The scaling in data speed and span of the optical links demands modulators to be concurrently performant and cost-effective. Silicon photonics (SiPh), a photonic integrated circuit technology that leverages the fabrication sophistication of complementary metal-oxide-semiconductor technology, is well-positioned to deliver the performance, price, and manufacturing volume for the high-speed modulators of future optical communication links. SiPh has relied on the plasma dispersion effect, either in injection, depletion, or accumulation mode, to demonstrate efficient high-speed modulators. The high-speed plasma dispersion silicon modulators have been commercially deployed and have demonstrated excellent performance. Recent years have seen a paradigm shift where the integration of various electro-refractive and electro-absorptive materials has opened up additional routes toward performant SiPh modulators. These modulators are in the early years of their development. They promise to extend the performance beyond the limits set by the physical properties of silicon. The focus of our study is to provide a comprehensive review of contemporary (i.e., plasma dispersion modulators) and new modulator implementations that involve the integration of novel materials with SiPh.

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Integration of Silicon Photonics into DRAM Process

Cited by 14 publications

References 4 publications

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

A 3D-integrated 25Gbps silicon photonics receiver in PIC25G and 65nm CMOS technologies

Taking silicon photonics modulators to a higher performance level: state-of-the-art and a review of new technologies

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