Integration of PZT thin films on a microfluidic complex system

A concept of a nanoporous anodic aluminum oxide (AAO) membrane as a vibro-active micro/nano-filter in a micro hydro mechanical system for the filtration, separation, and manipulation of bioparticles is reported in this paper. For the fabrication of a nanoporous AAO, a two-step mild anodization (MA) and hard anodization (HA) technique was used. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were used to analyze the surface morphology of nanoporous AAO. A nanoporous structure with a pore diameter in the range of 50–90 nm, an interpore distance of 110 nm, and an oxide layer thickness of 0.12 mm with 60.72% porosity was obtained. Fourier-transform infrared spectroscopy (FTIR) and energy-dispersive X-ray spectroscopy (EDS) were employed to evaluate AAO chemical properties. The obtained results showed that the AAO structure is of hexagonal symmetry and showed where Al2O3 is dominant. The hydrophobic properties of the nanoporous surface were characterized by water contact angle measurement. It was observed that the surface of the nanoporous AAO membrane is hydrophilic. Furthermore, to determine whether a nanomembrane could function as a vibro-active nano filter, a numerical simulation was performed using COMSOL Multiphysics 5.4 (COMSOL Inc, Stockholm, Sweden). Here, a membrane was excited at a frequency range of 0–100 kHz for surface acoustics wave (SAW) distribution on the surface of the nanoporous AAO using a PZT 5H cylinder (Piezo Hannas, Wuhan, China). The SAW, standing acoustic waves, and travelling acoustic waves of different wavelengths were excited to the fabricated AAO membrane and the results were compared with experimental ones, obtained from non-destructive testing method 3D scanning vibrometer (PSV-500-3D-HV, Polytec GmbH, Waldbronn, Germany) and holographic interferometry system (PRISM, Hy-Tech Forming Systems (USA), Phoenix, AZ, USA). Finally, a simulation of a single nanotube was performed to analyze the acoustic pressure distribution and time, needed to center nanoparticles in the nanotube.

Section: Introductionmentioning

confidence: 99%

Development of Nanoporous AAO Membrane for Nano Filtration Using the Acoustophoresis Method

Patel

Janušas

Palevičius

et al. 2020

“…Vibrations during the electrochemical anodization process can be generated by using a piezoelectric ceramic material, which vibrates during excitation. It is widely used in various applications, such as microfluidic devices [35,36], particle manipulation [37], sensors [38], etc. Lead zirconate titanate (PZT) is an attractive piezoelectric ceramic material with good electromechanical properties; e.g., PZT rings are widely used in the development of various devices [39].…”

Section: Introductionmentioning

confidence: 99%

Development and Analysis of Electrochemical Reactor with Vibrating Functional Element for AAO Nanoporous Membranes Fabrication

Cigane

Palevičius

Jurenas

et al. 2022

Nanoporous anodic aluminum oxide (AAO) is needed for a variety of purposes due to its unique properties, including high hardness, thermal stability, large surface area, and light weight. Nevertheless, the use of AAO in different applications is limited because of its brittleness. A new design of an electrochemical reactor with a vibrating element for AAO nanoporous membranes fabrication is proposed. The vibrating element in the form of a piezoceramic ring was installed inside the developed reactor, which allows to create a high-frequency excitation. Furthermore, mixing and vibration simulations in the novel reactor were carried out using ANSYS 17 and COMSOL Multiphysics 5.4 software, respectively. By theoretical calculations, the possibility to excite the vibrations of five resonant modes at different frequencies in the AAO membrane was shown. The theoretical results were experimentally confirmed. Five vibration modes at close to the theoretical frequencies were obtained in the novel reactor. Moreover, nanoporous AAO membranes were synthesized. The novel aluminum anodization technology results in AAO membranes with 82.6 ± 10 nm pore diameters and 43% porosity at 3.1 kHz frequency excitation and AAO membranes with 86.1 ± 10 nm pore diameters and 46% porosity at 4.1 kHz frequency excitation. Furthermore, the chemical composition of the membrane remained unchanged, and the hardness decreased. Nanoporous AAO has become less brittle but hard enough to be used for template synthesis.

“…A microresonator in the design process of an effective microfluidic system is a fundamental part and requires an effective potency to differentiate and process multivariable data [ 21 ]. Many fabrication processes exist [ 22 , 23 , 24 ], but piezoelectrically-actuated or -sensed microresonators are ideal for a large-scale integration to form an array on a single sensing or actuating platform in MEMS.…”

Section: Introductionmentioning

confidence: 99%

Design of Controllable Novel Piezoelectric Components for Microfluidic Applications

Čekas

Janušas

Guobienė

et al. 2018

This paper reviews recent investigations and achievements in the design of controllable functional components for improving microfluidic systems, its effectiveness, and functionality. The main purpose was to design novel microstructures with piezoelectric properties (microresonators), which enable one to control the effectiveness of fluid flow in micro-hydro-mechanical devices for biomedical/biochemical purposes. Controllable properties were obtained by incorporating different types of binders in a piezoelectric ceramic matrix (lead zirconate titanate): polyvinyl butyral (PVB), poly methyl methacrylate (PMMA), and polystyrene (PS). The change in chemical composition of PZT helps to manipulate the piezoelectric characteristics, surface morphology, mechanical properties, etc., of the designed microfluidic element with the microstructure in it.