Integration of a laser interferometer and a CMM into a measurement system for measuring internal dimensions

Tasic, T.; Ačko, Bojan

doi:10.1016/j.measurement.2010.11.002

Cited by 17 publications

(4 citation statements)

References 6 publications

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“…Three probability distributions are used to transform the limits of the relevant information into a standard uncertainty, they are Gauss distribution, Rectangular, and U distribution. Usually, we take Rectangular distribution [23].…”

Section: Resultsmentioning

confidence: 99%

Different Approaches in Uncertainty Evaluation for Measurement of Complex Surfaces Using Coordinate Measuring Machine

Vrba

Palenčár

Hadžistević

et al. 2015

Measurement Science Review

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This paper describes a methodology for uncertainty assessment for Coordinate Measuring Machine measurement of complex real work pieces from industry. The study applied two approaches (in scanning mode only) for estimating the measurement uncertainty with the support of Taguchi plan in the experiment containing five factors: scanning speed, sample density, probe configuration, scanning direction, and position of measuring object. In the first approach the uncertainty was estimated by measuring the basic geometric objects (primitives like sphere and torus) representing the decomposition of complex surfaces and in the second one a complex surface was treated as an unknown quantity. Calculated uncertainty Type A for both measurement tasks was in the range from 0.65 µm to 6.47 µm. Evaluation of the uncertainty Type B covered specifications of the machine and standard uncertainties derived from temperature effects. Total u B component was found to be in order of 0.4 µm. Future research will be directed towards the development and application of simulation methods

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Section: Resultsmentioning

confidence: 99%

Different Approaches in Uncertainty Evaluation for Measurement of Complex Surfaces Using Coordinate Measuring Machine

Vrba

Palenčár

Hadžistević

et al. 2015

Measurement Science Review

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“…To comply with the Abbe principle (reference and sensing points aligned to the measurement direction [191]), different set ups have been proposed. Two wide flat mirrors are often attached symmetrically to the probing system; their mean is Abbe compliant and the interferometric counting is not broken while disengaging [42], [224], [274]. Miniature step gauges for testing non-contact CMSs, featuring high surface cooperativeness and dimensional stability, were introduced in [72] and further developed in [7], [45] and [290].…”

Section: Step Gaugesmentioning

confidence: 99%

Dimensional artefacts to achieve metrological traceability in advanced manufacturing

et al. 2020

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“…Finally the measurements are carried out by the high precision optical probe. In order to improve the existing comparative procedure for measuring complex dimensions and surfaces, Tasic et al [263] developed a measurement system which consists of a CMM and a laser interferometer for traceable absolute measurements. The laser interferometer is used for traceable measurement, and the CMM is only adopted as a guiding mechanism for the probe.…”

Section: Cooperative Integrationmentioning

confidence: 99%

A review of interferometry for geometric measurement

Yang

Zhang

2018

Meas. Sci. Technol.

104

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As high-precision measuring instruments have developed, interferometers have been widely applied in the measurement of lengths and of the shape of surfaces, with nanometer precision. The emergence of the laser is one of the revolutions that has led to a well-defined traceability route to the definition of the meter via interferometry. Another change is the ever-increasing adoption of detector arrays substituting for conventional methods of recording and analyzing interferograms. New applications have also arisen from the adoption of microscopes, optical fibers, chip-level components and diffractive optical elements, developing enhanced analogues of conventional interferometers, which have the advantages of high integration, low noise levels, and complete sets of measuring instruments with a high level of automation. Since the requirements for measurement parameters and the environment are becoming more complex, we expect that the related instruments will play a progressively significant role in the progress of advanced manufacturing processes and quality control. Multi-sensor integrated flexible measurement methods have been proposed to perform measurements with holistic, more accurate and reliable information. However, most of the proposed methods are not intelligent and are highly integrated, providing only specific solutions for given measuring tasks. In this paper, the principles, progress, prospects and development trends of interferometry are reviewed.

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Integration of a laser interferometer and a CMM into a measurement system for measuring internal dimensions

Cited by 17 publications

References 6 publications

Different Approaches in Uncertainty Evaluation for Measurement of Complex Surfaces Using Coordinate Measuring Machine

Different Approaches in Uncertainty Evaluation for Measurement of Complex Surfaces Using Coordinate Measuring Machine

Dimensional artefacts to achieve metrological traceability in advanced manufacturing

A review of interferometry for geometric measurement

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