Integration and Bio-Functionalization of Vertically Aligned Carbon Nanotube Forests on High Frequency AlN Gravimetric Sensors

Abstract

Abstract:In this work, we grow different types of carbon nanotube (CNT) forests directly on AlNbased electroacoustic biosensors and study their functionalization efficiency. CNTs are used to increase the effective surface area of the sensor, pursuing a better sensitivity, without increasing the sensor capacitance. Here we use a general method for CNT bio-functionalization with specific receptors for targeted species. First, we make them hydrophilic. Next, we cover them with alternating polymers. Finally, we incubate their surface in an N-hydroxysuccinimide biotin solution. To study the functionalization homogeneity along the CNT length, Streptavidin conjugated with fluorescein isothiocyanate is used as the targeted species for confocal fluorescence microscopy characterization.

Characterization of AlN thin film piezoelectric coefficient d31 using Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

“…In recent years, with the continuous progress of technology, people pay more attention to the miniaturization and low power consumption of sensors. Micro-Electro-Mechanical Systems (MEMS) are widely used in consumer electronics, smart cars, smart medicine, and other fields because of their small size and high-volume processing [1][2][3][4]. Piezoelectric thin film materials have an increased potential for applications in MEMS, where such as ultrasonic transducers and energy harvesters are a growing focus in the realm of smart sensing and new energy.…”

Plasma‐functionalized Highly Aligned CNT‐based Biosensor for Point of Care Determination of Glucose in Human Blood Plasma

“…The sidewalls and the tips of aligned CNTs provide high surface area for immobilization of the receptor, which results in faster and more reliable glucose detection . Furthermore, their properties such as wide electrochemical potential window, high thermal and electrical conductivity, and proper mechanical stability make them thriving candidates for covalent attachment of a receptor and better electron transfer between electrode and receptor .…”