Integrated waveguide interferometer with picometric performances

Abstract

We present an integrated optical waveguide interferometer highly compact and easy-to-use. Metrological study is focused on the resolution and the noise level of the sensor. A standard Allan deviation lower than 50 pm has been observed in standard environment. Power spectral densities up to 150 fm.Hz-1/2 at 10 kHz are achieved. The flicker level is not reached because of the environmental conditions but the high frequency noise is likely to be lower than 100 fm. Hz-1/2. We present measures for steps of 0.5 nm at a sample frequency of 1 kHz. Although we use it as sensing motions measurement over micrometric range, the maximum displacement range is 5 centimeters depending on the output lens which is used.

An affordable and easy-to-use interferometer with a dedicated acquisition system

“…In this paper, we present a compact and affordable interferometer since we have developed an acquisition system made of commercial components to compute the position on an embedded system. In section II, we present the new version of the PicoMove system presented in [7]. The results are presented in section III and a conclusion is drawn in section IV.…”