We present mechanically flexible
opto-fluidic fluorescence sensors
based on heterogeneously integrated microscale vertical cavity surface
emitting lasers (micro-VCSELs) and silicon photodiodes (Si-PDs). Micro-
and millimeters-scale, printable forms of 850 nm-emitting micro-VCSELs
and Si-PDs are coassembled into integrated fluorescence sensor arrays
over large area in flexible, liquid-proof constructions on a polyethylene
terephthalate (PET) substrate, where lithographically defined optical
isolation trenches and multilayer-based wavelength- and angle-selective
spectral filters are incorporated to effectively block the wave-guided
and reflected excitation light to the Si-PD and, thus, significantly
enhance the signal-to-noise ratio and detection limit. The resulting
optoelectronic fluorescence sensors integrated with elastomeric fluidic
channels on plastics also enable mechanically bendable operation at
a bending radius of down to ∼50 mm, as well as multiplexed,
real-time monitoring of fluorescent analytes flown through the opto-fluidic
channels, with minimum detectable luminophore concentration of 5 ×
10–5 wt %.