Integrated refractive index sensor based on an AlN-PSiO₂ hybrid plasmonic microdisk resonator

Abstract

In this paper, a microdisk resonator (MDR) based on an A l N − P S i O 2 hybrid plasmonic waveguide (HPW) and its refractive index (RI) sensing characteristics are investigated. The plasmonic characteristics of the MDR based on the A l N − P S i O 2 HPW (APHPW-MDR) in near-infrared wavelengths are studied by using the finite element method. Through the structure parameter optimizations, the propagation length ( L p r o p ) of the APHPW-MDR is ∼ 165 µ m , which is ∼ 2.5 times as long as that of the MDR based on the AlN HPW (AHPW-MDR). The simulation results show that the quality factor ( Q ) and extinction rate (ER) of the APHPW-MDR are ∼ 621.3 and ∼ 30 d B , respectively. The RI sensing sensitivity ( S ) of the RI sensor based on the APHPW-MDR is ∼ 276.6 n m / R I U . The RI sensor based on the APHPW-MDR has wide application prospects in high-performance biochemical sensing, and it can also be used in integrated optical filters, modulators, switches, routers, and delay circuits.