Integrated optics in LiNbO3

Sohler, W.

doi:10.1016/0040-6090(89)90827-4

Cited by 22 publications

(5 citation statements)

References 18 publications

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“…Please note that the fabrication techniques concerning PPLN/W is not this thesis' aim. For further insight into the matter, information contained in [Fouchet et al 1987], [Sohler 1989], [Chanvillard et al 2000] might be of interest to certain readers. Interaction type type-0 type-I type-II…”

Section: A Quick Recap On Generating Photon Pairs Via Spdc In Ppln/wmentioning

confidence: 99%

All-optical synchronization for quantum networking

Fedrici

Ngah

Alibart

et al. 2018

Quantum Technologies 2018

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This manuscript reports the development of fundamental resources for long distance quantum communication based on fibre telecom technology and non-linear optical waveguides. After a general introduction on quantum communication, the thesis is structured along three parts. The first part illustrates the development of two photonic polarization entanglement sources suitable for quantum networking. Both sources allow the generation of paired photons in the telecom C-band of wavelengths via spontaneous parametric down conversion (SPDC) in periodically poled lithium niobate waveguides (PPLN/W). The first source relies on type-II phase matching. In this configuration, two important elements, namely fiberbased walk-off compensation, and deterministic separation of the paired photons using lowloss, dense wavelength division multiplexing (DWDM) filters, are detailed. On the other picosecond pulsed telecom fiber laser, operating at 2.5 GHz repetition rate, acting as a master optical clock, enabling to accurately synchronize the emission of photon pairs in the telecom C-band of wavelengths at two remote locations. This innovative approach is applied for synchronizing two remote PLLN/W based sources operated at 2.5 GHz, and preliminary results on two-photon interference obtained with single photons coming from each source are shown and discussed.

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Section: A Quick Recap On Generating Photon Pairs Via Spdc In Ppln/wmentioning

confidence: 99%

All-optical synchronization for quantum networking

Fedrici

Ngah

Alibart

et al. 2018

Quantum Technologies 2018

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“…Lithium Niobate (LiNbO 3 or LN) has proven to be the material of choice for a wide range of applications due to its exceptional piezoelectric, electro-acoustical, electro-optical, and non-linear optical properties [1]. The different crystallographic orientations of LN are heavily utilized for applications in surface-acoustic-wave (SAW) resonators [2], optical filters [3], optical sensors [4], modulators [5][6][7], transducers [8,9], optical waveguides [10,11], Q-switch lasers [12,13], oscillators [14], etc.…”

Section: Introductionmentioning

confidence: 99%

High-Quality Dry Etching of LiNbO3 Assisted by Proton Substitution through H2-Plasma Surface Treatment

et al. 2022

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The exceptional material properties of Lithium Niobate (LiNbO3) make it an excellent material platform for a wide range of RF, MEMS, phononic and photonic applications; however, nano-micro scale device concepts require high fidelity processing of LN films. Here, we reported a highly optimized processing methodology that achieves a deep etch with nearly vertical and smooth sidewalls. We demonstrated that Ti/Al/Cr stack works perfectly as a hard mask material during long plasma dry etching, where periodically pausing the etching and chemical cleaning between cycles were leveraged to avoid thermal effects and byproduct redeposition. To improve mask quality on X- and Y-cut substrates, a H2-plasma treatment was implemented to relieve surface tension by modifying the top surface atoms. Structures with etch depths as deep as 3.4 µm were obtained in our process across a range of crystallographic orientations with a smooth sidewall and perfect verticality on several crystallographic facets.

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“…Currently, integrated optical devices are being fabricated from Tiindiffused or proton-exchanged surface layers on single crystal LiNbO 3 wafers [2]. Since these waveguides are made by diffusion processes, they do not have sharp interfaces or good compositional uniformity, which leads to spatial variations in refractive index.…”

Section: Introductionmentioning

confidence: 99%

The Growth of Optical Quality LiNbo₃ Thin Films On Sapphire and LiTao₃ Substrates Using Solid-Source Mocvd

1995

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High quality lithium niobate (LiNbO 3 ) epitaxial thin films have been grown on c-plane sapphire and LiTaO3 substrates by solid-source MOCVD using the tetramethyl-heptanedionate sources, Li(thd) and Nb(thd) 4 . Phase content was controllable, and stoichiometric films were reproducibly deposited over a broad temperature range from a Li(thd)-rich source. Using sapphire substrates, with which the occurrence of multiple in-plane orientations is typically a problem, LiNbO 3 films with only one in-plane orientation could be prepared within a narrow range of growth conditions. XRD rocking curve FWHM values as low as 0.04', and optical waveguiding losses near 2dB/cm (1200A thick film, TM 0 mode, 632.8nm) were obtained. However, film thicknesses on sapphire were limited to 2000A because of cracking caused by the large thermal expansion mismatch, and in such thin films, optical confinement is poor.In contrast, LiTaO 3 has almost same lattice constants and thermal expansion coefficients as LiNbO 3 , making it a potentially superior substrate material. Lithium niobate films up to 6000A were successfully deposited on LiTaO 3 substrates without cracking. Film quality was greatly improved, with FWHM values as low as 0.01', and rms surface roughness less than 10 A. Preliminary optical waveguiding losses less than 6 dB/cm for the TEO mode have been achieved.

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Integrated optics in LiNbO3

Cited by 22 publications

References 18 publications

All-optical synchronization for quantum networking

All-optical synchronization for quantum networking

High-Quality Dry Etching of LiNbO3 Assisted by Proton Substitution through H2-Plasma Surface Treatment

The Growth of Optical Quality LiNbo₃ Thin Films On Sapphire and LiTao₃ Substrates Using Solid-Source Mocvd

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Integrated optics in LiNbO3

Cited by 22 publications

References 18 publications

All-optical synchronization for quantum networking

All-optical synchronization for quantum networking

High-Quality Dry Etching of LiNbO3 Assisted by Proton Substitution through H2-Plasma Surface Treatment

The Growth of Optical Quality LiNbo3 Thin Films On Sapphire and LiTao3 Substrates Using Solid-Source Mocvd

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The Growth of Optical Quality LiNbo₃ Thin Films On Sapphire and LiTao₃ Substrates Using Solid-Source Mocvd