1988
DOI: 10.1109/50.4096
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Integrated optical waveguides in polyimide for wafer scale integration

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Cited by 56 publications
(10 citation statements)
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“…Other interesting data, giving additional information on the possible use of polyimides as optical interconnects, were published by Selvaraj et al, 36 Hewak and Jeronimek,37 Tonchev et al 38 and Rooks et al 39 On the basis of the available data, some chemical structure-transparency dependence can be identified as follows. Monomers containing the hexafluoroisopropylidene linking group are suitable to produce transparent polyimides and possibly other polymers such as poly(phenylquinoxaline)s. Polyimides which possess two such links (Sixef-33® and Sixef-44®) are colorless and exhibit low optical losses.…”
Section: Transparent Polymersmentioning
confidence: 93%
“…Other interesting data, giving additional information on the possible use of polyimides as optical interconnects, were published by Selvaraj et al, 36 Hewak and Jeronimek,37 Tonchev et al 38 and Rooks et al 39 On the basis of the available data, some chemical structure-transparency dependence can be identified as follows. Monomers containing the hexafluoroisopropylidene linking group are suitable to produce transparent polyimides and possibly other polymers such as poly(phenylquinoxaline)s. Polyimides which possess two such links (Sixef-33® and Sixef-44®) are colorless and exhibit low optical losses.…”
Section: Transparent Polymersmentioning
confidence: 93%
“…epoxy, polyimides, diffused materials) are presently being applied to the board level, while for wafer-level systems, polyimides are predominantly being explored due to their well known etching behavior, thermal and mechanical stability. [1O, 28,29] The optical losses in all these materials are well below 1 dB/cm when optimized. Single mode waveguides in nonlinear materials are primarily patterned using an inverted rib technique through etching of an underlying layer prior to application of the polymer film.…”
Section: Ovfical Polymers and Wafer Networkmentioning
confidence: 98%
“…However, direct writing with lasers or e-beams is also possible [9]. Polymers can be etched with solvents [10,11] or by Reactive Ion Etching (RIE) [12,13]. Losses in etched waveguides typically range from 0.1 dB/cm at 850 nm wavelength to 0.3 dB/cm at 1300 nm.…”
Section: Post-deposition Processingmentioning
confidence: 99%