Integrated optical readout for miniaturization of cantilever-based sensor system

Nordström, Maria; Zauner, Dan A.; Calleja, Montserrat; Hübner, Jörg; Boisen, Anja

doi:10.1063/1.2779851

Cited by 45 publications

(41 citation statements)

References 13 publications

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“…[1][2][3][4][5][6][7] Cantilever sensors, which integrate 'topdown' miniaturized MEMS devices with 'bottom up' selfassembly of biomolecules, offer the unique ability to convert biomolecular reactions occurring on one side of the cantilever into mesoscopic bending motion for biosensing and smart nanorobotic applications. [8] The differential mode (defined as the bending of the 'active' cantilever minus the bending of an in situ reference cantilever coated with an non-reactive coating) has been shown to be essential for biospecific analysis and exploited experimentally to detect pH, [9,10] sequence-specific DNA hybridization with single nucleotide polymorphisms, [11][12][13][14][15][16][17] and protein recognition. [18][19][20][21] However, further advances have been limited by a lack of theory underlying the origins of surface stress.…”

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confidence: 99%

Physics of Nanomechanical Biosensing on Cantilever Arrays

et al. 2008

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Living systems that transform biomolecular reactions at the nanoscale into mechanical work at multiple nano-, meso-and macroscopic length scales have inspired the advancing fields of nanotechnology. [1][2][3][4][5][6][7] Cantilever sensors, which integrate 'topdown' miniaturized MEMS devices with 'bottom up' selfassembly of biomolecules, offer the unique ability to convert biomolecular reactions occurring on one side of the cantilever into mesoscopic bending motion for biosensing and smart nanorobotic applications. [8] The differential mode (defined as the bending of the 'active' cantilever minus the bending of an in situ reference cantilever coated with an non-reactive coating) has been shown to be essential for biospecific analysis and exploited experimentally to detect pH, [9,10] sequence-specific DNA hybridization with single nucleotide polymorphisms, [11][12][13][14][15][16][17] and protein recognition. [18][19][20][21] However, further advances have been limited by a lack of theory underlying the origins of surface stress. For example, both the direction and amplitude of cantilever motion have experimentally been found to depend on the length of the bio-molecule reacting on the cantilever. [11][12][13][14][15][16][17] These effects cannot be explained by the traditional theory developed for macroscopic systems, which ignores the physical properties of the active layer. Therefore, new theoretical approaches need to be developed. Moreover the development of a fundamental theory to identify the key 'figures of merit' will aid the rational design of new coatings and device geometries with significantly improved detection sensitivities for biosensing applications. The challenge for theory is that these complex BioMEMS devices are essentially multiscale systems in which molecularlevel signals are transduced to mesoscopic elements, to allow the readout by macroscopic methods. The multilayer structure of cantilever sensors comprises typically a silicon cantilever (500 mm long, 100 mm wide and 1 mm thick), thin gold films (20 nm), a self-assembled monolayer (SAM) (1-2 nm thick) all in a buffer solution environment. Each of these layers requires different modeling techniques which together span traditionally distinct areas, namely material science, solid-state physics, organic chemistry and soft matter theory, respectively. Each of these techniques tends to impose different boundary conditions and approximations, which often break down at the interfaces. They often assume ideal properties, for example, uniformity and flatness, which can differ significantly from experimentally prepared samples.[22] Therefore, the challenge is to develop a unified multiscale model of nanomechanical sensors and to test the assumptions of this model with experiments. Here, we report the first quantitative multiscale model to describe the transduction of specific biochemical reactions into micromechanical cantilever bending motion. Our approach can be divided into five steps (see Experimental Section for more details):(i) Firstly, we hav...

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Physics of Nanomechanical Biosensing on Cantilever Arrays

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“…16 CH 3 ] were purchased form Aldrich. We prepared 1 mM solution of each alkylthiol in distilled water.…”

Section: Self-assembled Monolayer Immobilizationmentioning

confidence: 99%

“…Therefore, techniques able to measure these displacements with subnanometer accuracy in bandwidths of 1 Hz are required. Main techniques for the readout of the nanomechanical response include the optical lever method, 13 interferometry-based methods, 14,15 integrated optical waveguides, 16,17 capacitive read-out, 18,19 and the use of piezoresistive cantilevers. [20][21][22][23] The optical lever is the most widespread method because of its simplicity, extreme sensitivity, and the capability for measuring in vacuum, air, gas mixtures, and liquids.…”

Section: Introductionmentioning

confidence: 99%

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Martínez¹,

Kosaka²,

Tamayo³

et al. 2010

Review of Scientific Instruments

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A nano-cheese-cutter to directly measure interfacial adhesion of freestanding nano-fibers J. Appl. Phys. 111, 024315 (2012) Stabilization and growth of non-native nanocrystals at low and atmospheric pressures J. Chem. Phys. 136, 044703 (2012) Nanoparticle production in arc generated fireballs of granular silicon powder AIP Advances 2, 012126 (2012) Stability and topological transformations of liquid droplets on vapor-liquid-solid nanowires J. Appl. Phys. 111, 024302 (2012) Role of RuO3 for the formation of RuO2 nanorods Appl. Phys. Lett. 100, 033108 (2012) Additional information on Rev. Sci. Instrum. We present an instrument based on the scanning of a laser beam and the measurement of the reflected beam deflection that enables the readout of arrays of nanomechanical systems without limitation in the geometry of the sample, with high sensitivity and a spatial resolution of few micrometers. The measurement of nanoscale deformations on surfaces of cm 2 is performed automatically, with minimal need of user intervention for optical alignment. To exploit the capability of the instrument for high throughput biological and chemical sensing, we have designed and fabricated a two-dimensional array of 128 cantilevers. As a proof of concept, we measure the nanometer-scale bending of the 128 cantilevers, previously coated with a thin gold layer, induced by the adsorption and self-assembly on the gold surface of several self-assembled monolayers. The instrument is able to provide the static and dynamic responses of cantilevers with subnanometer resolution and at a rate of up to ten cantilevers per second. The instrumentation and the fabricated chip enable applications for the analysis of complex biological systems and for artificial olfaction.

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“…4.18b). When the waveguidecantilever is vibrating, it changes the coupling efficiency (transmission) which results in an optical amplitude modulation [78,79]. This method enables the multiplexing of an array of resonators with a single probing laser.…”

Section: End-coupled Optical Waveguidementioning

confidence: 98%

Transduction

Schmid¹,

Villanueva²,

Roukes³

2016

Fundamentals of Nanomechanical Resonators

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The efficient transduction of nanomechanical resonators is quintessential for any practical application. In the context of this book, transduction refers to the translation of mechanical motion to an electrical signal and vice versa for detection and actuation, respectively. In this chapter the most common underlying physical transducing mechanisms are quickly introduced. Most of these mechanisms are of an electrical nature, such as electrodynamic, electrostatic, thermoelastic, piezoresistive, or piezoelectric transduction. Nanomechanical resonators transduced with one of these techniques are therefore known as nanoelectromechanical systems (NEMS). But it is also common practice to transduce nanomechanical resonators by optic means. The full optic transduction and control of nanomechanical resonators is, e.g., employed in the field of cavity optomechanics.

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Integrated optical readout for miniaturization of cantilever-based sensor system

Cited by 45 publications

References 13 publications

Physics of Nanomechanical Biosensing on Cantilever Arrays

Physics of Nanomechanical Biosensing on Cantilever Arrays

High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Transduction

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