Integrated optical gas sensor based on O-ring resonator and loop waveguide mirror on silicon nitride platform

Elmanova, Anna

doi:10.46354/i3m.2021.emss.046

Cited by 1 publication

(1 citation statement)

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“…Silicon nitride (SiN) is a popular platform for sensing applications based on photonics integrated circuits (PIC). These sensors are large, so their quality factor is higher than that of sensors based on the Silicon-on-insulator (SOI) 12,13 platform. SiN platform supports wide types of sensors, including MZI-based 14 , based on microring resonators 15 , as well as on more complex structures, for example, based on a loop wave mirror 16 .…”

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confidence: 99%

Simulation of a gas sensor on the integrated photonics silicon nitride platform

Aleksakina,

Zakoyan,

Ivanov

et al. 2023

Optical Technologies for Telecommunications 2022

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The article describes an approach to simulating a microring resonator structure on the silicon nitride integrated photonics platform when exposed to various hazardous to human health gases. We simulated various gases by changing the refractive index of the medium surrounding the resonator from 1 (vacuum) to 1.001768 (CCl4). The microring structure resonant wavelengths varied for various gases, and the quality factor, sensitivity, and intrinsic detection limit were determined. The simulation results show that it is possible to detect a wide range of gases hazardous to human health, including carbon tetrachloride, mercury vapor, carbon monoxide, and nitrogen monoxide, using the developed sensor. However, it is impossible to distinguish the last two gases based on the results of the current work using the SiN platform. Coatings are one of the potential ways to improve the designed sensor for detecting these gases.

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