Integrated Optical Fiber-Tip Cantilevers

Abstract

A microcantilever at the end face of an integrated optical fiber is reported, fabrication is uniquely achieved using a precision dicing saw. The methodology is a single-step rapid process, capable of achieving trenches with high aspect ratio (>10:1). The platform on which fabrication is made is a monolithic, integrated optical fiber. This integrally fuses optical fiber to a planar substrate using flame hydrolysis deposition (FHD) and high temperature consolidation (>1000 o C). This paper is the first report of a fiber-tip cantilever using the technique and this integrated platform. As an approach to quantify the optical response of such a multicavity arrangement, a method using Mason's rule is presented. This is used to infer the spectral responses of individual cavities formed and through physical actuation, an estimation of the cantilever's spring constant is made.

Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement

“…Moreover, several other energy conversion processes could be utilized to actuate vibrations in a cantilever sensor, such as electromagnetic Lorentz forces [12,13]. On other hand, as sensing components, capacitive [14], piezoelectric [13], piezoresistive [15], and optical transducers [16] are the most commonly used methods in cantilever sensor applications. In this work, we develop MEMS-based cantilever sensors with embedded thermal excitation and piezoresistive sensing components.…”

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

“…Some research studies dealing with MEMS-based resonance sensors have indicated that they employ the thermal actuator due to its large actuation force [8], simple fabrication [9], and flexibility in the choice of materials [10]. Furthermore, piezoresistive-based sensing is also typically used in MEMS sensors besides capacitive [11], piezoelectric [12] or optical transducers [13]. Piezoresistors are the simplest form of piezoresistive devices with several advantages: low cost, small size, low phase lag, and extensive dynamic range [14].…”

Consolidation of flame hydrolysis deposited silica with a 9.3 µm wavelength CO 2 laser

“…FHD is a commercial technique used to deposit layers of doped silica onto the surface of a substrate for planar lightwave circuits and device integration [4,5]. The process is capable of depositing layers of silica soot several microns thick with levels of dopants tailored to suit a range of applications.…”