Integrated optical dual-cantilever arrays in silica on silicon

Cooper, Peter; Carpenter, Lewis G.; Mennea, Paolo L.; Holmes, Christopher; Gates, James C.; Smith, Peter G. R.

doi:10.1364/oe.22.031801

Cited by 7 publications

(2 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The problem of mechanical structures breaking is mentioned, as well as a solution: anti-buckling structures in combination with a specific Si etching process. Cooper et al [ 8 ] demonstrated suspended silica waveguides with a cross-section of 100

× 40

. Their waveguide material is thermal SiO

in combination with silica created by flame hydrolysis deposition (FHD), and the suspended waveguides are realized by a combination of dicing and wet etching.…”

Section: Introductionmentioning

confidence: 99%

Electrothermal Actuators for SiO2 Photonic MEMS

Peters

Tichem

2016

Micromachines

View full text Add to dashboard Cite

This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 sans-serifμnormalm) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are positionable. These structures are explored as part of a novel concept for highly automated, sub-micrometer precision chip-to-chip alignment. In order to prevent residual stress-induced fracturing that is associated with the release of thick oxide structures from a silicon substrate, a special reinforcement method is applied to create suspended silicon dioxide beam structures. The characterization includes measurements of the post-release deformation (i.e., without actuation), as well as the deflection resulting from quasi-static and dynamic actuation. The post-release deformation reveals a curvature, resulting in the free ends of 800 sans-serifμnormalm long silicon dioxide beams with 5 sans-serifμnormalm-thick polysilicon to be situated approximately 80 sans-serifμnormalm above the chip surface. Bimorph actuators that are 800 sans-serifμnormalm in length produce an out-of-plane deflection of approximately 11 sans-serifμnormalm at 60 mW dissipated power, corresponding to an estimated 240 ∘normalC actuator temperature. The delivered actuation force of the 800 sans-serifμnormalm-long bimorph actuators having 5 sans-serifμnormalm-thick polysilicon is calculated to be approximately 750 μN at 120 mW.

show abstract

× 40

. Their waveguide material is thermal SiO

in combination with silica created by flame hydrolysis deposition (FHD), and the suspended waveguides are realized by a combination of dicing and wet etching.…”

Section: Introductionmentioning

confidence: 99%

Electrothermal Actuators for SiO2 Photonic MEMS

Peters

Tichem

2016

Micromachines

View full text Add to dashboard Cite

show abstract

“…[1][2] [3]. In this invited paper work conducted at Southampton University will be presented, making use of novel fabrication techniques for producing arrays of cantilevers incorporating optical waveguides [4].…”

Section: Introductionmentioning

confidence: 99%