Integrated optical components employing slab waveguides for sensor applications

Helmers, H.; Bettech, P.; Rimet, R.

doi:10.1109/68.475785

Cited by 4 publications

(2 citation statements)

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“…The most interesting feature of such a system is that the light launched into one outer waveguide, say WG1, will be transferred to the other waveguide WG2, after a certain distance called the coupling length even if the outer optical channels WG1 and WG2 are spatially well separated. Reported potential applications of RC waveguides are the remote coupler [14], an 0733-8724/97$10.00 © 1997 IEEE integrated optical sensor [17], a TE/TM polarization splitter [15], and an integrated optical circulator [18]. If the mode of an isolated outer waveguide with the propagation constant is used for an excitation, the characteristic coupling length can be determined from the propagation constants of the two (symmetric antisymmetric modes of the entire system, which are closest to as follows:…”

Section: Linear Radiatively Coupled Waveguidesmentioning

confidence: 99%

Analysis of power-dependent switching between radiatively coupled planar waveguides

Shamonin

Lohmeyer

Hertel

1997

J. Lightwave Technol.

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Effective coupling between two remote optical waveguides without branching sections can be achieved in a three-guide system with multimode central waveguide. We investigate the nonlinear power switching of c.w. laser radiation by such radiatively coupled waveguides. It is shown that effective all-optical switches with spatially well separated input/output channels can be realized although the influence of multimode interference on the switching characteristics becomes more pronounced for increasing thickness of the central guide. Different coupling regimes are specified, and the changes in switching characteristics during the transformation from one regime to another is studied. Numerical calculations for the critical power are compared with an approximate analytical expression. It is also shown that, at a moderate input power, a small number of modes determines the switching behavior.

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Section: Linear Radiatively Coupled Waveguidesmentioning

confidence: 99%

Analysis of power-dependent switching between radiatively coupled planar waveguides

Shamonin

Lohmeyer

Hertel

1997

J. Lightwave Technol.

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“…Differences in intensity are compared and calibrated to correspond to a physical change in the displacement of the object. Slab waveguides have also been employed to perform similar interferometry processes for evanescent wave sensing [20].…”

Section: Optical Waveguidesmentioning

confidence: 99%

Through-wafer interrogation of MEMS device motion

Dawson¹

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Microelectromechanical systems (MEMS) have been the focus of many research groups because of their wide variety of uses in sensing and actuation applications. A fundamental barrier facing designers of next generation MEMS is the inability to access accurate, real-time microstructure positional information to determine if the device is performing as expected. Previously explored optical and electrical methods of MEMS device monitoring are often only suitable for research environments, or are unable to produce clear and meaningful characterization of device motion. The most desirable MEMS monitoring method would be one that could be implemented at the device level, which would allow the monitoring system to be fabricated along with the device itself. This research explores a through-wafer method of optically monitoring and characterizing the motion of a lateral comb resonator fabricated using the MultiUser MEMS Process Service (MUMPS). Positional monitoring results obtained from a 1.3 µm wavelength through-wafer optical probe are presented, as well as a method of device level implementation of the monitoring system.

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