Integrated on-site collection and off-site analysis of airborne molecular contamination in cleanrooms for integrated circuit manufacturing processes

Volatile organic compounds and ionic substances contamination in cell processing facilities during rest period; a preliminary assessment of exposure to cell processing operators

“…The effects of ionic substances are often reported in semiconductor cleanrooms because their presence has a negative impact on semiconductor manufacturing [ 25 , 26 ]. However, the presence of ionic substances in CPFs has not been evaluated.…”

“…Furthermore, exposure to VOCs such as aromatics represented by BTX (benzene, toluene, and xylene), aliphatic compounds, and aldehydes used in these building materials is of particular concern because of their potentially harmful effects on human health [ [22] , [23] , [24] ]. Ionic substances, such as CH 3 COO − generated from peracetic acid used in decontaminants, and nitrogen oxides (NOx) and sulfur oxides (SOx) from outdoor environment, are also known to affect the air quality [ 25 , 26 ]. For example, NO 3 − and SO 4 2− are the main contributors to urban air pollution [ 27 ], and urban enter CPFs during outdoor air intake.…”