We have fabricated and tested RF SQUIDS made of Nb and YBa2Cu3O7 (YBCO), a high‐temperature superconductor, at 10 GHz using TE011 mode cavities and HTS microstrip resonators. Devices were screened at 27 MHz, and subsequently evaluated at 10 GHz. The SQUID circuit parameters, k2Q and β, were determined at different temperatures.