Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
DOI: 10.1109/memsys.2001.906512
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Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives

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Cited by 27 publications
(12 citation statements)
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“…As the fly height was reduced from several mm to just a couple of nm as areal density was increased over the years, it also became necessary to control it more actively. For this, a resistive heating element is now implemented in any recording head for thermal fly-height control (TFC) [62]. The ABS profile and the flying characteristics are modified by the thermal protrusion when the …”
Section: Magnetic Read-head Designmentioning
confidence: 99%
“…As the fly height was reduced from several mm to just a couple of nm as areal density was increased over the years, it also became necessary to control it more actively. For this, a resistive heating element is now implemented in any recording head for thermal fly-height control (TFC) [62]. The ABS profile and the flying characteristics are modified by the thermal protrusion when the …”
Section: Magnetic Read-head Designmentioning
confidence: 99%
“…Khanna et al (5) proposed a deformable slider using a bulk PZT in 1990. Recently, a partially deformable ABS using a thermal actuator (4) has been proposed. In this study, the direct actuation scheme is adopted because of low driving force, which is suitable for MEMSbased thin film actuators.…”
Section: Actuation Schemesmentioning
confidence: 99%
“…An active slider with an actuator was first proposed by YeackScranton et al (1) in 1990 for contact recording. Since then, various kinds of active sliders using a bulk PZT (2) , thin film PZT (3) and thermal actuators (4) have been reported. However they have not been in practical use.…”
Section: Introductionmentioning
confidence: 99%
“…To achieve such an ultra-small head-disk clearance, the wide distribution of head-disk clearance due to current manufacturing tolerances is the biggest problem to be solved. To solve this problem, the concept of individual and in-situ adjustment of head-disk clearance by means of a micro-actuator built-in into a HDD slider has been proposed [1][2][3][4][5]. Applying this concept, the authors previously developed a thermal-flying-height-control (TFC) slider that carries a micro-thermal actuator (heater) at the trailing end of the slider [9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%