Integrated microelectromechanical gyroscope under shock loads

Nesterenko, Tamara G.; Koleda, A N; Barbin, Evgenii

doi:10.1088/1757-899x/289/1/012003

Cited by 3 publications

(2 citation statements)

References 13 publications

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“…In order to ensure the working reliability of the MIMU, researchers and engineers all over world have completed various studies to solve the above-mentioned two issues. For the first issue, it can be improved through the optimal design of the gyro structure [7][8][9][10][11], like the optimal design of the folding beam [9,10] and the limit structure design of the mass block [8], etc. Such measures can only ensure its reliable operation in the state of no power, and cannot guarantee the normal operation of the device in the case of power [10].…”

Section: Introductionmentioning

confidence: 99%

Design of a Projectile-Borne Data Recorder Triggered by Overload

Wang

Zhu

et al. 2020

Electronics

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The projectile-borne data recorder is used to measure and record the position and attitude data of exterior ballistic flights, which experience high overload during the launching process. The navigation algorithm can be optimized by analyzing the data stored in the recorder. As the primary means of acquiring the navigation data, the micro inertial measurement unit (MIMU) is an inevitable part of the projectile equipment. However, its mechanical structure could hardly bear the high overload during operation. In view of the above problems, a novel projectile-borne data recorder triggered by overload is designed in this paper. The recorder could have the navigation system powered when the projectile leaves the barrel so as to activate the data recording of the high overload. Furthermore, the viability of the MIMU of the high overload is guaranteed through a specific way of system encapsulation. In the proposed design, the overload switch redundancy and the power supply redundancy were adopted to improve reliability. The proposed design is tested with practical experiments, and the results show that the proposed recorder could be effectively triggered by overloading, and the supply voltage is stable, which helps record reliable data for the projectile.

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Section: Introductionmentioning

confidence: 99%

Design of a Projectile-Borne Data Recorder Triggered by Overload

Wang

Zhu

et al. 2020

Electronics

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“…Microelectromechanical systems combine mechanical and electrical components of extremely small dimensions. They require protection from external influences of various origins for their work: physical, chemical, and mechanical [1][2][3][4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Influence of Technological Process for Microelectromechanical Sensors Manufacturing on their Technical Characteristics

Nesterenko

Barbin

Koleda

2019

MSF

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The article discusses the technological process for MEMS sensors manufacturing, which provides the minimum allowable technological defects to achieve MEMS technical characteristics. The paper deals with experiments on the definition of technological operations and the choice of their parameters. The factors influencing the size of technological defects are revealed. There is a technology to manufacture MEMS considered as "silicon on glass." There were successful experiments with the use of mask thickness of 540 nm and 450 nm. The slope of the faces does not exceed 1o, the maximum height of the surface roughness profile was 75 nm.

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