2012
DOI: 10.1108/03056121211280404
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Integrated MEMS in package

Abstract: Purpose -The purpose of this paper is to present the utilities of packaging and PCB fabrication processes for manufacturing micro electromechanical systems (MEMS) and its package for sensing and actuation applications. Design/methodology/approach -A broad array of manufacturing approaches available in the packaging industry, including lamination, lithography, etching, electroforming, machining, bonding, etc. and a large number of available functional materials such as polymers, ceramics, metals, etc. were expl… Show more

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Cited by 6 publications
(4 citation statements)
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“…What has not been shown yet, is the combination of PCBs with electronic components for microfluidic systems control and electrochemical detection in a monolithic manner. Compared to other LoC platforms, PCB demonstrates ideal electronics integration and high fabrication precision, resulting from the several decades of industrial manufacturing accumulated experience [7,10]. For PoC diagnostic devices, both commercially and scientifically, such properties are of great significance.…”
Section: Introductionmentioning
confidence: 99%
“…What has not been shown yet, is the combination of PCBs with electronic components for microfluidic systems control and electrochemical detection in a monolithic manner. Compared to other LoC platforms, PCB demonstrates ideal electronics integration and high fabrication precision, resulting from the several decades of industrial manufacturing accumulated experience [7,10]. For PoC diagnostic devices, both commercially and scientifically, such properties are of great significance.…”
Section: Introductionmentioning
confidence: 99%
“…the Lab-on-PCB [17]. Such as simple substrate is ideal for commercial upscaling of LoC devices, since it benefits from the high degree of electronics integration, high precision, and the accumulated experience of several decades of industrial manufacturing [13,18]. Examples of PCBbased devices include micromixers [17], nucleic acid amplification chips [19] and chemical sensors [20].…”
Section: Page 2 Ofmentioning
confidence: 99%
“…The combination of both, biochemistry and appropriate electronics on the same platform could reduce noise interference from the various electrical interconnections and as a result may improve the measurement’s signal-to-noise ratio (SNR) [ 35 ]. Finally, the high degree of electronics integration, the exceptional accuracy, and the accumulated experience and skills of a mature industrial manufacturing process highlight the great advantage to LoPCB platforms [ 36 , 37 , 38 ].…”
Section: Introductionmentioning
confidence: 99%