Integrated Mach-Zehnder Interferometer on SU-8 Polymer for Designing Pressure Sensors

Pelletier, Nicolas; Bêche, Bruno; Tahani, Najat; Camberlein, Lionel; Gaviot, Étienne; Goullet, Antoine; Landesman, Jean-Pierre; Zyss, Joseph

doi:10.1109/icsens.2005.1597780

Cited by 4 publications

(4 citation statements)

References 10 publications

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“…Oleh kerana itu, kebanyakkan perantiperanti yang terbaik dihasilkan dari bahan ini. Bahan ini turut digunakan dalam sistem mikroelektro-mekanikal (MEMS) (Schumacher et al 2008;Roach et al 2007;Chang 2009& Wen et al 2008, SU-8 fotorintangan (PR), modulator (Hyun 2003), peranti bendalir mikro (Roman et al 2006), mikro transduser (Wen 2006), Interferometer Sensor Ammonia (Bednorz et al 2006), MikroBiosensor Interferometer (Esinenco et al 2005) dan Interferometer Mach-Zehnder (Pelletier et al 2005). …”

Section: Kajian Kepustakaan A) Pandu Gelombang Polimerunclassified

The Study of the Effects of Polishing Rotation Speed to the Length of Cut End Face SU-8 Polymer on Silicon Substrate

Ab-Rahman¹,

Aziz²,

Arif³

et al. 2009

JKEJ

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ABSTRAKKajian ini memfokuskan kepada ciri-ciri gilapan bagi pandu gelombang polimer. Tujuan utamanya adalah untuk mengkaji bagaimana halaju putaran gilapan memberi kesan kepada panjang terpotong permukaan hujung sisi pandu gelombang polimer SU-8 di atas substrat silikon. Terdapat tujuh set halaju putaran yang dikenakan iaitu 50, 100, 150, 200, 250, 300 dan 350 rpm. Dari keputusan yang diperoleh, dapat disimpulkan bahawa peratus potongan bagi setiap halaju putaran adalah ≤ 0.5 % (50 rpm), 0.6 -1.0 % (100 rpm), 3.8 -4.8 % (150 rpm), 7.7 -10.6 % (200 rpm), 15.7 -18.3% (250 rpm), 25.6 -27.4 % (300 rpm) dan 40.0 -43.7 % (350 rpm).Kata Kunci: Halaju putaran, polimer su-8, panjang terpotong, pandu gelombang planar. ABSTRACT This research have focused on polishing characterize of polymer based waveguides. The aims of this research are to study how polishing rotation speeds affect the length of cut end face SU-8 polymer on silicon substrate.There are seven sets of rotation velocities which are 50, 100, 150, 200, 250, 300, and 350 rpm. From the obtained result, it can be concluded that percentage of cut length for each rotation velocity is ≤ 0.5 % (50 rpm), 0.6 -1.0 % (100 rpm), 3.8 -4.8 % (150 rpm), 7.7 -10.6 % (200 rpm), 15.7 -18.3% (250 rpm), 25.6 -27.4 % (300 rpm) and 40.0 -43.7 % (350 rpm).

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Section: Kajian Kepustakaan A) Pandu Gelombang Polimerunclassified

The Study of the Effects of Polishing Rotation Speed to the Length of Cut End Face SU-8 Polymer on Silicon Substrate

Ab-Rahman¹,

Aziz²,

Arif³

et al. 2009

JKEJ

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“…MEMS diaphragm can be made from polymers by processes such as injection moulding, embossing and stereolithography [10]. Polymer diaphragm has been widely used for a limited detection space as presented in [11][12][13][14][15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Modeling of a polyimide diaphragm for an optical pulse pressure sensor

Hasikin‬

Soin

Ibrahim

2009

2009 International Conference for Technical Postgraduates (TECHPOS)

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This paper presents the modeling of a polyimide diaphragm for an optical pulse pressure sensor. Polyimide is a type of polymer materials that possessed low linear coefficient of thermal expansion and has good thermal stability. The polyimide diaphragm has been designed and its performance is analyzed in terms of diaphragm deflection, diaphragm pressure sensitivity and diaphragm resonance frequency. Two design parameters namely diaphragm radius and diaphragm thickness are varied to study the diaphragm performance. It can be concluded that the modeled micro-diaphragm with a diaphragm radius of 90µm and diaphragm thickness of 4µm respectively has satisfied the maximum allowable deflection and operated in optimum frequency response.

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“…Due to this characteristic, some of the finest devices are made out of this material. It has been applied in Micro-Electromechanical (MEMS) system, SU-8 Photoresistance (PR) and integrated Mach-Zehnder interferometer [5] .…”

Section: Introductionmentioning

confidence: 99%

The Polishing of Cutting-Edge Polymer-on-Glass for Pigtailing Preparation

Abdolreza¹

2009

American Journal of Engineering and Applied Sciences

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Problem statement: The high quality of cutting-edge surface is important in optical waveguide's efficiency. The perfect polishing of end surface is significant to deliver the best quality of light waves and minimize the device losses such as insertion loss and return loss. Hence, this research is concern on the parameters in polishing SU-8 polymer to increase the efficiency of waveguide. The main research is to study on how polishing parameter affect the cut length of the end surface of SU-8 polymer on silicon and determining the best parameters for polishing SU-8 polymer. Approach: Seven sets of rotation velocities were chosen which were 50, 100, 150, 200, 250, 300 and 350 rpm for the first part. The graph of cut length versus velocity at different sand paper size was plotted based on the data obtained from this experiment. Equation for each graph was acquired to determine relationship between these two parameters. For the second part, four samples were used. Each sample was polished with same rotation time and sandpaper size prescribed but with different rotation speed. Rotation speed is selected between 200 to 350 rpm with rotation time of 15 min using sandpaper with size of 0.3µm. Results: We found that the cut percentage of each rotation velocity are as follows: 50 rpm: ≤0.5%, 100 rpm: 0.6-1.0%, 150 rpm: 3.8-4.8%, 200 rpm: 7.7-10.6%, 250 rpm: 15.7-18.3%, 300 rpm: 25.6-27.4%, 350 rpm: 40.0-43.7%. The rotation speed suitable for polishing SU-8 polymer is below 200 rpm and the rotation speed over the point (ex. 300 rpm) will cause cracking to the polymer although the silicon based layer look smooth. Conclusion: In this experiment it was found that the cut length increases as the rotation rate and the size of sand paper increased. It can also be concluded that polishing the sample at the speed of 200 rpm is the best polishing method for polymer SU-8 waveguide, at 15 min rotation time with the used of 0.3µm Aluminium oxide sandpaper size. Despites giving the smooth surface, it also reduces the cutting time. The SU-8 polymer is not suitable to be polished at a high rotation speed as the surface may damage

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Integrated Mach-Zehnder Interferometer on SU-8 Polymer for Designing Pressure Sensors

Cited by 4 publications

References 10 publications

The Study of the Effects of Polishing Rotation Speed to the Length of Cut End Face SU-8 Polymer on Silicon Substrate

The Study of the Effects of Polishing Rotation Speed to the Length of Cut End Face SU-8 Polymer on Silicon Substrate

Modeling of a polyimide diaphragm for an optical pulse pressure sensor

The Polishing of Cutting-Edge Polymer-on-Glass for Pigtailing Preparation

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