Integrated force arrays: theory and modeling of static operation

Jacobson, James; Goodwin-Johansson, Scott H.; Bobbio, Stephen M.; Bartlett, Charles; Yadon, L.

doi:10.1109/84.465121

Cited by 21 publications

(12 citation statements)

References 14 publications

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“…Actuators based on electrostatic principles include scratch drive actuators (SDA's) [127], [128] comb drives [129], [130], parallel plate designs [131], [132] membrane deformation actuators [133], [134], Sshape flexures [135], distributed force actuators [136], [137], and torsional/gimbaled actuators [138].…”

Section: Micro-scale Actuatorsmentioning

confidence: 99%

Single‐Chip Scanning Probe Microscopes

Sarkar

Mansour²

2015

Micro‐ and Nanomanipulation Tools

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Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large and bulky construction and to the use of piezoelectric materials. Large scanners have low resonant frequencies that limit their achievable imaging bandwidth and render them susceptible to disturbance from ambient vibrations. Array approaches have been used to alleviate the bandwidth bottleneck; however as arrays are scaled upwards, the scanning speed must decline to accommodate larger payloads. In addition, the long mechanical path from the tip to the sample contributes thermal drift. Furthermore, intrinsic properties of piezoelectric materials result in creep and hysteresis, which contribute to image distortion. The tip-sample interaction signals are often measured with optical configurations that require large free-space paths, are cumbersome to align, and add to the high cost of state-of-the-art SPM systems. These shortcomings have stifled the widespread adoption of SPMs by the nanometrology community. Tiny, inexpensive, fast, stable and independent SPMs that do not incur bandwidth penalties upon array scaling would therefore be most welcome. A method to increase the quality factor (Q-factor) of flexural resonators is introduced. The method relies on an internal energy pumping mechanism that is based on the interplay between electrical, iv mechanical, and thermal effects. To the best of the author's knowledge, the devices that are designed to harness these effects possess the highest electromechanical Qs reported for flexural resonators operating in air; electrically measured Q is enhanced from ~50 to ~50,000 in one exemplary device. A physical explanation for the underlying mechanism is proposed.The design, fabrication, imaging, and tip-based lithographic patterning with the first single-chip Scanning Thermal Microscopes (SThMs) are also presented. In addition to 3 DOF scanning, these devices possess integrated, thermally isolated temperature sensors to detect heat transfer in the tip-sample region.Imaging is reported with thermocouple-based devices and patterning is reported with resistive heater/sensors. An "isothermal electrothermal scanner" is designed and fabricated, and a method to operate it is detailed. The mechanism, based on electrothermal actuation, maintains a constant temperature in a central location while positioning a payload over a range of >35μm, thereby suppressing the deleterious thermal crosstalk effects that have thus far plagued thermally actuated devices with integrated sensors.

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Section: Micro-scale Actuatorsmentioning

confidence: 99%

Single‐Chip Scanning Probe Microscopes

Sarkar

Mansour²

2015

Micro‐ and Nanomanipulation Tools

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“…By interconnecting each unit of a cymbal or recurve actuator in arrays, it is possible to generate much larger displacement and higher blocked force compared to those from a single unit. While these devices are developed in meso/macro scale, Jacobson et al (1995) proposed a similar idea, which is applied in the MEMS domain. It is integrated force array, which is composed of thousands of micron-scale deformable capacitors.…”

Section: Introductionmentioning

confidence: 99%

Design, Modeling, and Initial Experiments on Microscale Amplification Device

Garcia

Nam

Lobontiu

2005

Journal of Intelligent Material Systems and Structures

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This article proposes the design of several microelectromechanical amplification devices formed of many identical microunits that are connected in a serial–parallel configuration, each being individually actuated and amplifying its own input motion. The microdevices realize the border-crossing from the micro-to the meso-scale displacement domain as they combine the micron-level individual inputs into millimeter-range output levels. The base structural unit is a flexure-based compliant device that is capable of transforming the input from a thermal actuator into an amplified displacement, about a direction perpendicular to the input one. The base unit is designed based on performance criteria, such as displacement amplification, input stiffness and output stiffness by utilizing finite element simulation, and an algorithm based on closed-form compliance equations of the incorporated flexure hinges. The microelectromechanical amplification device is monitored by means of embedded capacitive displacement sensors for the input port. The feasibility of the device design was verified through a numerical simulation and some initial experimental results are presented.

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“…Several MEMS researchers, among others Storment et al 1994;Liu and Will 1995;Jacobson et al 1995;Suh et al 1996) have proposed MEMS manipulator arrays. For an overview, see the work of Liu and Will (1995) or colleagues (1994a, 1994b).…”

Section: Microfabricated Actuator Arraysmentioning

confidence: 99%