Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps

Nguyen, Nam‐Trung; Meng, Audra H.; Black, J.P.; White, Richard M.

doi:10.1016/s0924-4247(99)00279-4

Cited by 76 publications

(28 citation statements)

References 10 publications

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“…The acoustic field leads to fluid motion near the membrane surface in the direction of the wave. This topic has not been further developed in recent years (Luginbuhl et al 1998, Nguyen et al 2000.…”

Section: Flexural Plate Wave Pumpsmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

421

249

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Micropumping has emerged as a critical research area for many electronics and biological applications. A significant driving force underlying this research has been the integration of pumping mechanisms in micro Total Analysis Systems (μTAS) and other multi-functional analysis techniques. Uses in electronics packaging and micromixing and microdosing systems have also capitalized on novel pumping concepts. The present work builds upon a number of existing reviews of micropumping strategies by focusing on the large body of micropump advances reported in the very recent literature. Critical selection criteria are included for pumps and valves to aid in determining the pumping mechanism that is most appropriate for a given application. Important limitations or incompatibilities are also addressed. Quantitative comparisons are provided in graphical and tabular forms.

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Section: Flexural Plate Wave Pumpsmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

421

249

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“…Reported micropumps can be classified into two main categories: mechanical micropumps and non-mechanical micropumps. Mechanical micropumps contain moving parts and utilize piezoelectric (Hsu and Le 2009), electrostatic (Bertarelli et al 2011), thermo-pneumatic (Chia et al 2011), pneumatic (Yang et al 2009), optical (Maruo et al 2009) or acoustic (Nguyen et al 2000;Wang et al 2010) to drive the moving parts. These micropumps are still not scalable to achieve portability and miniaturization due to their limits, such as relying on external power supplies or specialized equipments, pulsatile flow, complicated system design, as well as expensive fabrication process (Good et al 2006;Zhang et al 2007;Woias 2005).…”

Section: Introductionmentioning

confidence: 99%

A micropump based on water potential difference in plants

Liu

Zhang

et al. 2011

Microfluid Nanofluid

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In land plants, water vapor diffuses into the air through the stomata. The loss of water vapor creates a water potential difference between the leaf and the soil, which draws the water upward. Quantitatively, the water potential difference is 1-2 MPa which can support a water column of 100-200 m. Here we present the design and operation of a biomimetic micropump. The micropump is mainly composed of a 48-lm thick metal screen plate with a group of 102-lm diameter micropores and an agarose gel sheet with nanopores of 100 nm diameter. The micropores in the screen plate imitate the stomata to regulate the flow rate of the micropump. The agarose gel sheet is used to imitate the mesophyll cells around the stomata. The lost of water from the nanopores in the gel sheet can generate a water potential difference (more than 30 kPa) which can drive solution flow in a microfluidic chip. Results have shown that a precise flow rate of 4-8 nl/min can be obtained by using this micropump, and its ultra-high flow rate is 113-126 nl/min. The advantages of this biomimetic micropump include adjustable flow rate, simple structure and low fabrication cost. It can be used as a ''plug and play'' fluid-driven unit in microfluidic chips without any external power sources or equipments.

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“…Generation of FPW motion by a bulk PZT plate is discussed in Guo and Lal 2001. Deposition of an interdigitated electrode on a piezoelectric film (Wang et al 1998;Nguyen and White 1999) is another way to achieve FPW actuation without using bulk PZT plates.…”

Section: Device Fabrication and Simulationmentioning

confidence: 99%

An investigation of vibration-induced protein desorption mechanism using a micromachined membrane and PZT plate

Yeh

Kizhakkedathu

et al. 2008

Biomed Microdevices

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A micromachined vibrating membrane is used to remove adsorbed proteins on a surface. A lead zirconate titanate (PZT) composite (3 x 1 x 0.5 mm) is attached to a silicon membrane (2,000 x 500 x 3 microm) and vibrates in a flexural plate wave (FPW) mode with wavelength of 4,000/3 microm at a resonant frequency of 308 kHz. The surface charge on the membrane and fluid shear stress contribute in minimizing the protein adsorption on the SiO(2) surface. In vitro characterization shows that 57 +/- 10% of the adsorbed bovine serum albumin (BSA), 47 +/- 13% of the immunoglobulin G (IgG), and 55.3~59.2 +/- 8% of the proteins from blood plasma are effectively removed from the vibrating surface. A simulation study of the vibration-frequency spectrum and vibrating amplitude distribution matches well with the experimental data. Potentially, a microelectromechanical system (MEMS)-based vibrating membrane could be the tool to minimize biofouling of in vivo MEMS devices.

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Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps

Cited by 76 publications

References 10 publications

Recent advances in microscale pumping technologies: a review and evaluation

Recent advances in microscale pumping technologies: a review and evaluation

A micropump based on water potential difference in plants

An investigation of vibration-induced protein desorption mechanism using a micromachined membrane and PZT plate

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