2018
DOI: 10.1063/1.5013662
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Integrated amorphous silicon-aluminum long-range surface plasmon polariton (LR-SPP) waveguides

Abstract: We demonstrate the design, fabrication, and experimental characterization of a long range surface plasmon polariton waveguide that is compatible with complementary metal-oxide semiconductor backend technology. The structure consists of a thin aluminum strip embedded in amorphous silicon. This configuration offers a symmetric environment in which surface plasmon polariton modes undergo minimal loss. Furthermore, the plasmonic mode profile matches the modes of the dielectric (amorphous silicon) waveguide, thus a… Show more

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Cited by 18 publications
(24 citation statements)
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“…The LR-DLSPP waveguide's mode supporting a TM mode has a similar profile to the photonic TM mode fabricated based on the same material. The overlap integral between them shows up to 98 % coupling efficiency with very good tolerance to the offset of the metal stripe supporting the LR-DLSPP mode [27,28]. The LR-DLSPP configuration therefore demonstrates great potential for creation of photoconductive photodetectors based on germanium and other absorbing materials where good mode confinement and low absorption losses in metal are essential.…”
Section: Figure Of Merit Of Lr-dlspp Waveguidesmentioning
confidence: 75%
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“…The LR-DLSPP waveguide's mode supporting a TM mode has a similar profile to the photonic TM mode fabricated based on the same material. The overlap integral between them shows up to 98 % coupling efficiency with very good tolerance to the offset of the metal stripe supporting the LR-DLSPP mode [27,28]. The LR-DLSPP configuration therefore demonstrates great potential for creation of photoconductive photodetectors based on germanium and other absorbing materials where good mode confinement and low absorption losses in metal are essential.…”
Section: Figure Of Merit Of Lr-dlspp Waveguidesmentioning
confidence: 75%
“…In comparison, a gap SPP (MIM) can support a very high confined SPP mode but absorption losses from the metal arise, limiting the propagation distance to tens of the corresponding mode's wavelengths. The LR-DLSPP waveguide is currently the only plasmonic waveguide configuration that allows to achieve a good mode field confinement and high propagation length [25][26][27][28]. It has the highest evaluated figure of merit (FoM) among all other plasmonic waveguides, taking into account mode size, wavelength, and propagation length (Table 1) [7,26]:…”
Section: Figure Of Merit Of Lr-dlspp Waveguidesmentioning
confidence: 99%
“…Importantly, the in-plane electric field component of the LR-DLSPP modeessential for absorption in graphene, is very strong close to the graphene sheet even for the TM mode ( Fig. 1c) [58][59][60][61][62]. In our design, only half of the waveguide shown in Fig.…”
Section: Proposed Graphene Photodetector Arrangementmentioning
confidence: 92%
“…The possibility of an electromagnetic energy concentration and low loss propagation fundamentally depends on the geometrical structure of the SPP waveguide. Typical SPP waveguide structures are reported in the literature, such as metallic nanowires [2,3], metal strips [4,5], an array of metal nanoparticles [6], V-shaped waveguides [7,8] and wedge-shaped waveguides [9][10][11]. The structure of an SPP waveguide usually consists of a thin metallic layer deposited directly on a dielectric or separated from a dielectric by an insulator.…”
Section: Introductionmentioning
confidence: 99%