Instrument for measurement of transfer function voltage dividers

Baranov, Pavel; Tsimbalist, E.I.; Baranova, Vitaliya Evgenyevna

doi:10.1109/sibcon.2015.7146992

Cited by 5 publications

(6 citation statements)

References 10 publications

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“…Comb structures 16 are used as sensors in the drive oscillation channel. The drive oscillation control system with lock-in detection (Baranov et al , 2015) is described by Baranov et al (2017). The silicon structure is anchored to the glass substrate.…”

Section: Operating Principle Of Gyro-accelerometer Modulementioning

confidence: 99%

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Baranov

Nesterenko

Barbin

et al. 2019

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Purpose Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approach The finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. Findings Experimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes. Originality/value This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.

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Section: Operating Principle Of Gyro-accelerometer Modulementioning

confidence: 99%

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Baranov

Nesterenko

Barbin

et al. 2019

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“…Control over the vibration speed of the shaking table was made by piezoelectric sensors 3, their signals through a matching lock-in amplifier 4 [8][9] were supplied on the programsetting device 5. The last one are monitored and recorded the vibration parameters (amplitude and frequency).…”

Section: The Experimental Partmentioning

confidence: 99%

Gyropendulum and vibration forces – experimental research

2017

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Abstract. It is well-known that gyroscope base vibration as usual has a bad influence on accuracy of gyroscopic instruments and systems. During running and testing gyroscopic instruments are exposed to translational vibration, the accuracy and reliability are reducing. With rising demands on the accuracy and reliability of the gyropendulum systems, the problem of finding effects of vibration methods of research base and the possible ways to fix it remains relevant. The purpose of this paper is to present the results of experimental research of vibration influence on the gyropendulum, by using new term "vibration force". Two main regimes were tested: upwards and down displaced centre of mass of gyropendulum.

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“…Lock-in amplifiers are mainly used in physical and chemical sensing applications [17]- [26]. However, LIADI inputs are also used for calibration measurement instruments [15], [16], [27].…”

Section: Introductionmentioning

confidence: 99%

“…As shown in equation 1, the signal amplitude difference ΔV has an error that depends on the phase shifts of the input signals φx, and φ0 is a common-mode rejection ratio and phase shift of reference signal φref. [16] and [27] explain the possibility of reducing the error of measuring the absolute difference between the compared voltages induced by a phase error.…”

Section: Introductionmentioning

confidence: 99%