INRIM primary standard for microgas-flow measurements with reference to atmospheric pressure

Bergoglio, M.; Mari, D.

doi:10.1016/j.measurement.2011.10.039

Cited by 7 publications

(6 citation statements)

References 12 publications

(11 reference statements)

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“…This method is used for its directness in many laboratories, for example Istituto Nazionale di Ricerca Metrologica-INRIM [12], Laboratoire national de métrologie et d'essais-LNE [13,14], Physikalisch-Technische Bundesanstalt-PTB [15], Shanghai Institute of Measurement and Testing Technology-SIMT [16] and also by the company Inficon [17]. All of these organizations use it in the constant-pressure and variablevolume mode but SIMT also uses the constant-volume and variable-pressure mode.…”

Section: Accumulation Methodsmentioning

confidence: 99%

A survey of the principles for primary standards for atmospheric halogenated-hydrocarbon-leaks

et al. 2015

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Albeit the utilization of halogenated hydrocarbons in new devices is suppressed gradually, due to the protection of environment, large amounts of them still remain in existing equipment. It is important for metrology to carry out proper leak measurements of these devices during their service life with traceability to high quality primary standards. Efficient methods have been developed for vacuum leaks (gas outflow into vacuum) but halogenated hydrocarbons leak out into the atmosphere under real conditions. The design of primary standards that meet this condition is considerably more difficult and they are still rather rare. This paper gives an insight into the principles used for these standards, which can be classified into two groups: methods sensitive to the gas species and methods insensitive to the gas species.

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Section: Accumulation Methodsmentioning

confidence: 99%

A survey of the principles for primary standards for atmospheric halogenated-hydrocarbon-leaks

et al. 2015

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“…In leak metrology, the "state-of-the-art" instrument to achieve such measurements is the constant-pressure flowmeter [1], [2]. While the equation for the throughput can be written simply as:…”

Section: Introductionmentioning

confidence: 99%

“…𝑝 0 being the constant pressure set in the instrument, the associated volume variation device makes this instrument somewhat complicated to build [1], [2].…”

Section: Introductionmentioning

confidence: 99%

A Technique to Improve Low Leak Rate Measurement With a Constant-Volume Flowmeter

Boineau¹,

Plimmer²

2023

Proceedings of the 6th IMEKO TC16 Conference on Pressure and Vacuum Measurement

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Calibrating leak rates using a constant-volume flowmeter consists in measuring the pressure rise rate produced by the leak throughput in a measurement volume. When the leak rates to be determined are low, the latter should be as small as possible, and since it is composed of dead volumes of the tubing, the valves, the gauge, etc., one needs to determine this dead volume accurately. This paper describes an original and simple technique which provides a relative uncertainty in the calibration of the dead volume of a constant-volume flowmeter (~ 60 cm 3 ) of approximately 0.1 % (k = 1). In turn, the bottom end of the calibration range of the flowmeter has been brought down to about 5 × 10 -8 Pa•m 3 •s -1 .

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“…Therefore it was decided to realize leak elements with well-defined geometry. The artefacts have been characterized geometrically and the flow rate measured with primary standards [4][5][6][7][8][9] against vacuum and atmospheric pressure for different gases. In the first part of the paper, the description of the realization and geometrical characterization is reported.…”

Section: Introductionmentioning

confidence: 99%

Realization, characterization and measurements of standard leak artefacts

et al. 2015

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INRIM primary standard for microgas-flow measurements with reference to atmospheric pressure

Cited by 7 publications

References 12 publications

A survey of the principles for primary standards for atmospheric halogenated-hydrocarbon-leaks

A survey of the principles for primary standards for atmospheric halogenated-hydrocarbon-leaks

A Technique to Improve Low Leak Rate Measurement With a Constant-Volume Flowmeter

Realization, characterization and measurements of standard leak artefacts

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