2003
DOI: 10.1002/adem.200310096
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Inorganic–Organic Hybrid Polymers for Information Technology: from Planar Technology to 3D Nanostructures

Abstract: Sol‐gel synthesis allows inorganic–organic hybrid polymer materials (ORMOCER®s) to be produced, which can be functionalized to tailor their physical and chemical properties such as refractive index or optical loss. A particular material system is discussed here, which is synthesized without addition of water and is applied in optical communications. As examples for 2D and 2.5D technology, planar waveguides, stacked waveguides, and microlenses are shown. Using two‐photon polymerization initiated by femtosecond … Show more

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Cited by 117 publications
(82 citation statements)
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“…1 H, 13 C and 29 Si NMR spectra were recorded with a Bruker Avance 400 spectrometer operating at 400.13, 100.56 and 79.49 MHz, respectively. DMSO-d 6 was used as solvent for 1 H spectra while 13 C and 29 Si NMR spectra were recorded in DMSO, using D 2 O as external lock and Ernst angle to minimize acquisition time.…”
Section: Measurementsmentioning
confidence: 99%
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“…1 H, 13 C and 29 Si NMR spectra were recorded with a Bruker Avance 400 spectrometer operating at 400.13, 100.56 and 79.49 MHz, respectively. DMSO-d 6 was used as solvent for 1 H spectra while 13 C and 29 Si NMR spectra were recorded in DMSO, using D 2 O as external lock and Ernst angle to minimize acquisition time.…”
Section: Measurementsmentioning
confidence: 99%
“…DMSO-d 6 was used as solvent for 1 H spectra while 13 C and 29 Si NMR spectra were recorded in DMSO, using D 2 O as external lock and Ernst angle to minimize acquisition time. Chemical shifts (ppm) are referenced to tetramethylsilane (TMS).…”
Section: Measurementsmentioning
confidence: 99%
See 1 more Smart Citation
“…Lithography oriented hybrid organic-inorganic polymers emerged as great materials for fabrication of objects in both 2D and 3D configurations [1][2][3]. They are choice material for 3D femtosecond laser structuring due to several convenient features.…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, their refractive index and mechanical properties can be tuned by changing proportion between organic and inorganic part [4]. This led to extensive research in this area and, to date, new hybrid materials containing Si [1], Zr [4] and Ge [10] were made for 3DLL.…”
Section: Introductionmentioning
confidence: 99%