All inorganic lead-free halide perovskites have attracted much attention due to their non-toxic and good band gap. In this paper, we rst prepared all inorganic lead-free perovskite CsBi 3 I 10 thin lms by single source thermal evaporation deposition. The results show that CsBi 3 I 10 thin lms prepared by single source thermal evaporation have layered structure, high purity hexagonal phase and high crystallinity, which are consistent with the theoretical calculation results. The surface of the thin lm was compact and uniform, and had high homology with the crystal structure of the evaporation source material. After annealing, the crystallinity of the lm was further improved. The band gap of the CsBi 3 I 10 thin lm calculated was 1.83 eV, Perovskite solar cells based on CsBi 3 I 10 thin lms exhibit an e ciency of up to 0.84%. These results indicate that the proposed single source thermal evaporation method has the potential to prepare high e ciency inorganic lead-free perovskite solar cells.