2014
DOI: 10.1016/j.acme.2013.09.008
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Innovative technical solutions for evaporation of multilayer coatings by EB-PVD method

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Cited by 8 publications
(4 citation statements)
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“…Generally, during a PVD process the material to be deposited is evaporated from a solid or liquid source (target) and is carried in the form of plasma to the substrate, where it condenses. According to the method applied to obtain the evaporation of the target material, the most common PVD techniques are classified as follows: (i) sputtering deposition [54][55], (ii) cathodic-arc deposition [56][57], (iii) electron beam physical vapor deposition (EB-PVD) [58][59], (iv) pulsed laser deposition (PLD) [60][61], and (v) ion beam assisted deposition (IBAD) [62][63][64]. In addition, plasma assisted or enhanced physical vapor deposition has grown in importance owing to a number of advantages it offers compared to classical PVD methods, such the chance to deposit alloy compounds, and the ability to vary coating characteristics continuously throughout the film, providing functionally graded coatings [65].…”
Section: Physical Vapor Deposition (Pvd) Techniquesmentioning
confidence: 99%
“…Generally, during a PVD process the material to be deposited is evaporated from a solid or liquid source (target) and is carried in the form of plasma to the substrate, where it condenses. According to the method applied to obtain the evaporation of the target material, the most common PVD techniques are classified as follows: (i) sputtering deposition [54][55], (ii) cathodic-arc deposition [56][57], (iii) electron beam physical vapor deposition (EB-PVD) [58][59], (iv) pulsed laser deposition (PLD) [60][61], and (v) ion beam assisted deposition (IBAD) [62][63][64]. In addition, plasma assisted or enhanced physical vapor deposition has grown in importance owing to a number of advantages it offers compared to classical PVD methods, such the chance to deposit alloy compounds, and the ability to vary coating characteristics continuously throughout the film, providing functionally graded coatings [65].…”
Section: Physical Vapor Deposition (Pvd) Techniquesmentioning
confidence: 99%
“…By now technological variants of producing high-temperature single-layer metal (Me-Cr-Al-Y type) and ZrO2-8 wt.% Y2O3 (8YSZ) ceramic coatings by electron beam evaporation of ingots of the respective chemical composition from a cylindrical evaporator have been optimized and are widely applied, Figure 1 [4,5,7,8,[11][12][13][14][15].…”
Section: Evaporators Materials and Technological Variants Of Evaporationmentioning
confidence: 99%
“…An example is the original design of the multi-position modular crucible, allowing the production of the multilayer coatings in which the individual component layers are materials that require different parameters of evaporation by the electron beam evaporation method. The concept of the multi-position modular crucible was created by splitting the standard crucible into four modules, according to the division of materials into four groups carried out over high thermal conductivity materials, low thermal conductivity materials, refractory materials, and sublimating materials [25]. In order to evaporate materials with a low coefficient of thermal conductivity (e.g., Ti, Al 2 O 3 ), where intense heat dissipation from the walls of the crucible is required, a typical copper crucible directly cooled with water was designed.…”
Section: Devices and Systems For Implementation Of Hybrid Surface Engmentioning
confidence: 99%