Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Vallejo-Otero, V.; Crespo-Monteiro, N.; Valour, A.; Donnet, C.; Reynaud, S.; Ollier, N.; Blanc Mignon, M.F.; Chatelon, J.P.; Bleu, Y.; Gamet, E.; Jourlin, Y.

doi:10.1016/j.mtadv.2023.100430

Materials Today Advances

2023

DOI: 10.1016/j.mtadv.2023.100430

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Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

V. Vallejo-Otero,

N. Crespo-Monteiro,

A. Valour

et al.

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2024

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Influence of Initial Crystalline Phase of TiO2 to Obtain TiN Thin Films from Sol-Gel Route by Rapid Thermal Nitridation Process.

Vallejo-Otero,

Valour,

Bruhier

et al. 2024

Progress in Solid State Chemistry

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Influence of Initial Crystalline Phase of TiO2 to Obtain TiN Thin Films from Sol-Gel Route by Rapid Thermal Nitridation Process.

Vallejo-Otero,

Valour,

Bruhier

et al. 2024

Progress in Solid State Chemistry

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Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Cited by 1 publication

References 54 publications

Influence of Initial Crystalline Phase of TiO2 to Obtain TiN Thin Films from Sol-Gel Route by Rapid Thermal Nitridation Process.

Influence of Initial Crystalline Phase of TiO2 to Obtain TiN Thin Films from Sol-Gel Route by Rapid Thermal Nitridation Process.

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