Inkjet printing of uniform dielectric oxide structures from sol–gel inks by adjusting the solvent composition

Abstract

Adjusting ink's solvent composition with respect to the solvents volatility enabled printing of flat, nano-thick dielectric structures of high-performance.

Solution Processed Metal Oxide High‐κ Dielectrics for Emerging Transistors and Circuits

“…This was also the first report demonstrating feasibility of bar coating technique for the fabrication of high quality uniform oxide dielectric with extraordinary dielectric performance. Besides these noteworthy achievements, many other studies have investigated solution processed high κ oxide dielectrics using printing techniques …”

Tantalum(v) 1,3-propanediolate β-diketonate solution as a precursor to sol–gel derived, metal oxide thin films

“…Dilutions were made with diethylene glycol monoethyl ether (DEGEE), which allows the target viscosity ($10 mPa s) and surface tension ($30 mN m À1 ) for inkjet printing to be reached. However, unlike how Matavž et al 72 achieved the target viscosity and surface tension by mixing 1,3-propanediol with highly toxic 2-methoxyethanol, DEGEE presents a reduced exposure hazard with its lower vapor pressure, and can be used in lieu of 2methoxyethanol to achieve the target values. The results are shown in Table 1.…”

“…40 Elucidation of the exact leakage current mechanism would require an improved model, such as using a metal-insulatormetal (MIM) conguration and an impedance analyser. 72 However, given that the oxide layer needs to be exposed for photocuring, such a conguration would prove challenging. One solution to this problem in future studies could be to produce many MIM samples while following the procedure of Matavž et al, 72 with each sample having a different amount of photoexposure.…”

“…72 However, given that the oxide layer needs to be exposed for photocuring, such a conguration would prove challenging. One solution to this problem in future studies could be to produce many MIM samples while following the procedure of Matavž et al, 72 with each sample having a different amount of photoexposure. Furthermore, the layer geometry would need to be defect free and accurately ascertained for the model.…”

“…Dilutions for ink production from the proposed methods were performed by vortexing the product with diethylene glycol monoethyl ether (DEGEE) (Sigma-Aldrich, ReagentPlus 99%) in order to achieve the proper viscosity and surface tension for inkjet printing. 72 Viscosity was measured with a DV3T rheometer (AMETEK Brookeld, USA), and surface tension with a surface tensiometer model A3 (KINO Industry Co., Ltd., USA). All inkjet printing was performed with an OmniJet 300 printer (Unijet Co., Ltd., South Korea), using 10 pL Dimatix cartridges (FUJIFILM Dimatix, Inc., USA) where the ink was ltered using a Whatman Puradisc 13, GF/F, 0.7 mm glass syringe lter (GE Healthcare, USA).…”