Initiated Chemical Vapor Deposition of Poly(Ethylhexyl Acrylate) Films in a Large-Scale Batch Reactor

Abstract

The present study demonstrates the successful deposition of poly­(ethylhexyl acrylate) thin films in a large-scale closed-batch initiated chemical vapor deposition (iCVD) system. A horizontal cylindrical stainless-steel vacuum tank, which is highly utilized in industrial vacuum applications, was used as iCVD reactor. The effects of substrate temperature, precursor ratio, and pressure on the deposition rates were studied, and the results showed that a deposition rate of 315 nm/min can be achieved in a single run at a reactor pressure of 600 mTorr. At a lower chamber pressure of 400 mTorr, deposition rate decreases, whereas film uniformity increases. By carrying out depositions at successive cycles, thicker films could be obtained, without the need for extensive monomer consumption. The yield percentage was found to be 3.5 for the films deposited in closed-batch system at 400 mTorr, which is 35-fold larger than that of the classical iCVD flow system.

A Green Approach to Modify Surface Properties of Polyurethane Foam for Enhanced Oil Absorption

“…iCVD thin film depositions were performed in a custom-built stainless reactor, and its detailed description can be found elsewhere [ 17 ]. Foam samples were placed into the reactor bottom in which a heat exchanger was located on the backside of the reactor bottom.…”

Vapor deposition polymerization of synthetic rubber thin film in a plasma enhanced chemical vapor deposition reactor

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“…For instance, thin films are produced with lower amounts of precursors and faster processing times as compared to the production of bulk polymers. In other words, thin film production helps to reduce the environmental footprints of polymer process 4,5 . Furthermore, the large surface area‐to‐volume ratios of polymer thin films makes them significant components for a wide range of high‐tech applications especially requiring enhanced surface interactions such as biomedical, sensors, textile, microfluidic, membrane, and energy‐related fields 6–11 …”

Vapor deposition of stable copolymer thin films in a batchiCVDreactor

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“…Poly(ethylhexyl acrylate) (PEHA) is an important class of pressure sensitive adhesives polymers due to its long side chain and low glass-transition temperature. 30 Pressure-sensitive adhesive polymer thin films are in great demand for potential applications. They are used to join two different surfaces together without damaging them and any chemical reaction.…”