Initial stages of growth of poly(p-xylylene) coatings: AFM study

Streltsov, D. R.; Григорьев, Е. И.; Dmitryakov, Petr V.; Erina, N. A.; Mailyan, K. A.; Pebalk, A. V.; Чвалун, С. Н.

doi:10.1134/s0965545x09080069

Cited by 8 publications

(4 citation statements)

References 18 publications

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“…The discrete island topographies observed here are consistent with a previous AFM study on the initial Parylene-C growth. 43 The exposed PDMS surface of the prepared pcPDMS (up to 92% of the whole surface) facilitated the successful bonding after the oxygen plasma treatment as the regular PDMS-PDMS bonding.…”

Section: Surface Topography Of Parylene-c On the Pdms Surfacementioning

confidence: 97%

“…40 The key point of the present t-CVD process is that the Parylene-C deposition rate at 135 °C is low enough according to its Arrhenius equation, 41,42 which indicates the Parylene-C deposition on the PDMS surface is still in the initial island-growth stage without forming the continuous layer. 43 In the meantime, it's still high enough to caulk the free volume of the PDMS during the deposition period because of the small pore size, 360 Å 3 per pore at 135 °C (linear extrapolation from Dlubek's experimental data 1 ), which is equivalent to only 2-3 Parylene-C monomers. Parylene-C was used in this study due to its superior ability to resist the diffusion of gases and small molecules compared to other parylenes.…”

Section: Introductionmentioning

confidence: 99%

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Caulking polydimethylsiloxane molecular networks by thermal chemical vapor deposition of Parylene-C

Liu

Zhang

et al. 2016

Lab Chip

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Surface functionalization of polydimethylsiloxane (PDMS) is important in developing high-performance microfluidic devices. This work applied the thermal chemical vapor deposition (t-CVD) of Parylene-C onto PDMS to caulk the molecular network while retaining the original surface properties for the oxygen plasma bonding. The very low deposition rates (for example, a nominal rate of 0.12 Å min at 135 °C) of Parylene-C at elevated substrate temperatures enabled the reactive Parylene-C monomers to penetrate into the PDMS matrix up to 4.6 ± 0.1 μm (135 °C), which was verified for the first time by a scanning electron microscope with an energy dispersive X-ray analysis (SEM-EDAX). The Parylene-C caulked in the molecular network of PDMS matrix guaranteed an excellent resistance to small molecule permeations. Meanwhile, only discrete nucleation islands were formed on the top surface rather than a continuous Parylene-C layer as observed under the AFM scan, which made the processed PDMS surface ready for device assembly. This surface functionalization method has better long-term stability than the other wet-type rivals. The barrier for oxygen plasma bonding in previously reported dry surface treatments was also avoided, thereby, facilitating the device assembly. The present work successfully developed a novel pcPDMS (Parylene-C caulked PDMS) technique, which overcame the bonding difficulty in the previous works but retained the low small molecule permeability as before. Caulking a molecular network through the t-CVD of Parylene-C also demonstrated a new strategy of functionalizing polymer surfaces and preparing new hybrid materials for wide lab-on-a-chip applications.

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Section: Surface Topography Of Parylene-c On the Pdms Surfacementioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

Caulking polydimethylsiloxane molecular networks by thermal chemical vapor deposition of Parylene-C

Liu

Zhang

et al. 2016

Lab Chip

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“…It is known that parylene N shows a polymorphism crystalline structure, ,− and it is interesting to study the electrical properties in each crystalline form from T g to the β 2 -form. The aim of this work is to study and understand the dielectric properties in large temperature and frequency ranges.…”

Section: Introductionmentioning

confidence: 99%

Dielectric and Conduction Mechanisms of Parylene N at High Temperature: Phase-Transition Effect

2015

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Dielectric and electrical properties correlated with the structure analysis have been studied on 27% semicrystalline parylene-N (-H2C-C6H4-CH2-)n thin films. Transition-phase, AC- and DC-conduction mechanisms, and the MW-interfacial polarization were identified in parylene N at high temperature by experimental and theoretical investigations. The dielectric analysis based on the dc conductivity highlights a temperature of 230 °C as a transition temperature from the α-form to the β1-form. This structure transition is accompanied by a modification on the DC-conduction mechanisms from ionic to electronic conduction in the α-form and the β1-form, respectively. The AC conduction mechanism is governed by the small polaron tunneling mechanism (SPTM) with WH,α = 0.23 eV and a tunneling distance of 7.71 Å in the α-form, while it becomes a correlated barrier-hopping (CBH) mechanism with a WM,β 1 = 0.52 eV in the β1-form. The imaginary part of the electrical modulus formalism obeys the Kohlrausch-Williams-Watt (KWW) model and shows the presence of the interfacial polarization effect. The theoretical Kohlrausch exponent (βKWW) confirms the existence of the transition phase on the parylene N in the vicinity of the 230 °C as deduced by the DC- and the AC-conduction parameters. The correlations between the experimental results and the theoretical models are very useful knowledge and tools for diverse parylene N applications at high temperature.

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“…[1,2] Demirels reported [3] that there are two types of layers, including the amorphous (high energy part) and the crystalline (low energy part) areas. [4] However, the study lacked a theoretical method for building amorphous and crystalline membranes. In 2010, Smalara et al [5] carried out AM1, PM6, and B3LYP-DFT calculations to study p-xylylene based polymers to evaluate the surface electronic structures.…”

Section: Introductionmentioning

confidence: 99%

Sorption and permeation of gaseous molecules in amorphous and crystalline PPX C membranes: molecular dynamics and grand canonical Monte Carlo simulation studies

Bian¹,

Shu²,

Wang³

2012

Chinese Phys. B

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Amorphous and crystalline poly (chloro-p-xylylene) (PPX C) membranes are constructed by using a novel computational technique, that is, a combined method of NVT+NPT-molecular dynamics (MD) and gradually reducing the size (GRS) methods. The related free volumes are defined as homology clusters. Then the sorption and the permeation of gases in PPX C polymers are studied using grand canonical Monte Carlo (GCMC) and NVT-MD methods. The results show that the crystalline PPX C membranes provide smaller free volumes for absorbing or transferring gases relative to the amorphous PPX C area. The gas sorption in PPX C membranes mainly belongs to the physical one, and H bonds can appear obviously in the amorphous area. By cluster analyzing on the mean square displacement of gases, we find that gases walk along the x axis in the crystalline area and walk randomly in the amorphous area. The calculated permeability coefficients are close to the experimental data.

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Initial stages of growth of poly(p-xylylene) coatings: AFM study

Cited by 8 publications

References 18 publications

Caulking polydimethylsiloxane molecular networks by thermal chemical vapor deposition of Parylene-C

Caulking polydimethylsiloxane molecular networks by thermal chemical vapor deposition of Parylene-C

Dielectric and Conduction Mechanisms of Parylene N at High Temperature: Phase-Transition Effect

Sorption and permeation of gaseous molecules in amorphous and crystalline PPX C membranes: molecular dynamics and grand canonical Monte Carlo simulation studies

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