An in situ transmission electron microscopy ͑TEM͒ analysis of a solid electrolyte, Cu-GeS, during resistance switching is reported. Real-time observations of the filament formation and disappearance process were performed in the TEM instrument and the conductive-filament-formation model was confirmed experimentally. Narrow conductive filaments were formed corresponding to resistance switching from high-to low-resistance states. When the resistance changed to high-resistance state, the filament disappeared. It was also confirmed by use of selected area diffractometry and energy-dispersive x-ray spectroscopy that the conductive filament was made of nanocrystals composed mainly of Cu. Cu-SiO 2 , 12 and bilayer-types. 13,14 The mechanism of resistance switching is attributed to the formation and disappearance of the conductive filament in the solid electrolyte. When a bias voltage is applied, the ions generated at the anode are thought to migrate toward the cathode where they undergo reduction and become metal atoms. 8 Contrarily, an opposite bias voltage dissolves the metal composing filaments into the solid electrolyte.11 Therefore, an analysis of the conductive filament must provide important information for understanding this switching mechanism. Recently, conductive filament, which is formed in not only cation-type but also in aniontype electrolytes, was observed by scanning electron microscopy ͑SEM͒. 5,15,16 However, no detailed experimental results to confirm the existence of the filament during the switching process have been reported. Therefore, in situ transmission electron microscopy ͑TEM͒ with simultaneous electrical measurements has attracted a great deal of attention. 10,[17][18][19][20][21] In this letter, we use this in situ TEM method to reveal the switching mechanism of a solid electrolyte. Real-time observations of the filament formation and disappearance process were performed with the TEM instrument. We also clarified the structure and composition of the filament by the use of selected area diffractometry ͑SAD͒ and energydispersive x-ray spectroscopy ͑EDX͒.For the in situ TEM experiments, 21 commercially available Pt-Ir tips for scanning tunneling microscopy were further sharpened by ion milling. One Pt-Ir tip was used as the substrate and the other was used as a counter electrode. CuGeS thin films were deposited at room temperature by rf sputtering on Pt-Ir substrate. Since the substrate and the counter electrode of Pt-Ir were different in shape, the structure of Pt-Ir/Cu-GeS/Pt-Ir was asymmetric. The atomic composition of the sample layer was analyzed by means of EDX. The proportion of Cu:Ge:S was 4:4:2. The film thickness was between 8 and 60 nm, and no remarkable difference depending on thickness was recognized. The system was composed of a custom-made TEM holder with a PCcontrolled operating system. [21][22][23] The TEM instrument used mainly was a JEM-2010 microscope ͑200 kV, C s = 0.5 mm͒, having a vacuum of about 10 −5 Pa. The conduction properties were measured between the Pt-Ir counter...