Infrared tubular microcavity based on rolled-up GeSn/Ge nanomembranes

Wu, Xiang; Tian, Ziao; Cong, Huan; Wang, Yan; Riyanto, Edy; Huang, Gaoshan; Di, Zengfeng; Xue, Chunlai; Mei, Yongfeng

doi:10.1088/1361-6528/aad66e

Cited by 12 publications

(12 citation statements)

References 56 publications

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“…In this regard, recent attempts focused on amorphous GeSn [ 49 ] and rolled‐up GeSn/Ge membranes. [ 50 ] However, their demonstrated performance was limited to the visible‐NIR range due to the low Sn content.…”

Section: Introductionmentioning

confidence: 99%

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

Atalla

Assali

Attiaoui

et al. 2020

Adv Funct Materials

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Semiconductor membranes emerged as a versatile class of nanomaterials to control lattice strain and engineer complex heterostructures enabling a variety of innovative applications. With this perspective, herein this platform is exploited to tune simultaneously the lattice parameter and bandgap energy in group IV GeSn semiconductor alloys. As Sn content is increased to reach a direct bandgap, these semiconductors become metastable and typically compressively strained. It is shown that the relaxation in released membranes extends the absorption wavelength range deeper in the mid-infrared. Fully released Ge 0.83 Sn 0.17 membranes are integrated on silicon and used in the fabrication of broadband photodetectors operating at room temperature with a record wavelength cutoff of 4.6 µm, without compromising the performance at shorter wavelengths down to 2.3 µm. These membrane devices are characterized by two orders of magnitude reduction in dark current as compared to as-grown strained epitaxial layers. A variety of experimental tools and optimized calculations are used to discuss the crystalline quality, composition uniformity, lattice strain, and the electronic band structure of the investigated materials and devices. The ability to engineer all-group IV transferable mid-infrared photodetectors lays the groundwork to implement scalable and flexible sensing and imaging technologies exploiting these integrative, silicon-compatible strained-relaxed GeSn membranes.

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Section: Introductionmentioning

confidence: 99%

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

Atalla

Assali

Attiaoui

et al. 2020

Adv Funct Materials

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“…Photoluminescence (PL) spectrum elucidates the whispering gallery modes in the microresonator, of which the Q factor over 250 was obtained 19 . Although this is a very primary presentation in optics, further investigation and improvement of the deterministic delamination method for rolling microstructures would provide more complex structures with fruitful optical properties in advanced optical applications 50–52 .…”

Section: Resultsmentioning

confidence: 99%

Microdroplet-guided intercalation and deterministic delamination towards intelligent rolling origami

Zhang

Tian

et al. 2019

Nat Commun

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Three-dimensional microstructures fabricated by origami, including folding, rolling and buckling, gain great interests in mechanics, optics and electronics. We propose a general strategy on on-demand and spontaneous rolling origami for artificial microstructures aiming at massive and intelligent production. Deposited nanomembranes are rolled-up in great amount triggered by the intercalation of tiny droplet, taking advantage of a creative design of van der Waals interaction with substrate. The rolling of nanomembranes delaminated by liquid permits a wide choice in materials as well as precise manipulation in rolling direction by controlling the motion of microdroplet, resulting in intelligent construction of rolling microstructures with designable geometries. Moreover, this liquid-triggered delamination phenomenon and constructed microstructures are demonstrated in the applications among vapor sensing, microresonators, micromotors, and microactuators. This investigation offers a simple, massive, low-cost, versatile and designable construction of rolling microstructures for fundamental research and practical applications.

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“…XOI system can also be integrated with the above MBE growth. For instance, GeSn/Ge microresonators have been epitaxially grown on Ge‐on‐insulator wafer . GeSn is another semiconductor material for photonic devices with tunable bandgap from 0 to 0.8 eV, and the rolled‐up tubes further demonstrated pronounced resonant behavior …”

Section: Release Methodsmentioning

confidence: 99%

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Huang

et al. 2018

Adv Materials Technologies

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chemical vapor deposition (CVD). When it comes to on-chip integrations, these strategies are limited by accessible materials and slow processing rate, [31] and the generated defects in the produced amorphous materials placed restrictions to its further applications in high-performance devices. [32] Therefore, novel approaches and methods of fabricating 3D micro/ nanostructures are highly demanded.Rolled-up nanotechnology is an alternative technique that fabricates 3D nanostructures out of planar films called nanomembranes. Nanomembranes are defined as planar thin films with thicknesses between one to a few hundred nanometers. [33] These nanomembrane materials behave like soft materials while maintaining excellent properties like their bulk counterpart and therefore is an ideal platform for fabricating 3D nanostructures. Inspired by concepts of origami and kirigami, [34][35][36][37] researchers folded and rolled these nanomembranes into a number of fascinating 3D structures. [17,[38][39][40][41][42][43][44] Several review articles have been published with emphasis on nanomembranes thinning and manufacture, mechanical deformation, fundamental studies, and their practical applications. [33,41,[45][46][47] By releasing strain-engineered planar functional nanomembranes on sacrificial layers, complex rolled-up structures including tubes, [48][49][50][51][52][53][54] rings, [54][55][56] and helices [42,[57][58][59] can be constructed (for instance, see Figure 1f). This approach can be applied to engineer a wide range of organic and inorganic materials and their combinations, including metals, insulators, traditional semiconductor families, and recently emerged 2D materials. Given its compatibility to standard CMOS fabrication process and ability to manufacture large periodic arrays with precise geometric control, rolled-up nanotechnology further expands the applications of 3D nanostructures to a number of areas, including optical resonators, [60,61] photodetectors, [62,63] micromotors, [64][65][66] energy storage, [67] drug delivery, [68] gas detection, [53] and environmental decontamination. [69] The versatility in the materials design and geometric tuning in rolled-up nanotechnology presents tremendous opportunities for further developing sophisticated 3D fine structures.In this review, we focus on the materials perspective and fabrication process of rolled-up nanotechnology. First, we give a brief introduction of rolled-up mechanism, as well as its fabrication techniques and control strategies. We summarize and highlight recent advances of different materials systems and their corresponding rolling methodologies. Second, Rolled-up nanotechnology is an appealing technique that tunes planar films into complex 3D fine structures. The rolling-up mechanism and methodology of a huge variety of materials and their combinations are summarized, including metals, insulators, traditional semiconductor families, polymers, and recently emerged 2D materials. The basic principles of strain induction, fabrication methods, and techni...

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Infrared tubular microcavity based on rolled-up GeSn/Ge nanomembranes

Cited by 12 publications

References 56 publications

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

All‐Group IV Transferable Membrane Mid‐Infrared Photodetectors

Microdroplet-guided intercalation and deterministic delamination towards intelligent rolling origami

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

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